Dramatically Enhanced Broadband Photodetection by Dual Inversion Layers and Fowler–Nordheim Tunneling

ACS Nano ◽  
2019 ◽  
Author(s):  
Haiyang Zou ◽  
Xiaogan Li ◽  
Guozhang Dai ◽  
Wenbo Peng ◽  
Yong Ding ◽  
...  
Keyword(s):  
1997 ◽  
Vol 473 ◽  
Author(s):  
Heng-Chih Lin ◽  
Edwin C. Kan ◽  
Toshiaki Yamanaka ◽  
Simon J. Fang ◽  
Kwame N. Eason ◽  
...  

ABSTRACTFor future CMOS GSI technology, Si/SiO2 interface micro-roughness becomes a non-negligible problem. Interface roughness causes fluctuations of the surface normal electric field, which, in turn, change the gate oxide Fowler-Nordheim tunneling behavior. In this research, we used a simple two-spheres model and a three-dimensional Laplace solver to simulate the electric field and the tunneling current in the oxide region. Our results show that both quantities are strong functions of roughness spatial wavelength, associated amplitude, and oxide thickness. We found that RMS roughness itself cannot fully characterize surface roughness and that roughness has a larger effect for thicker oxide in terms of surface electric field and tunneling behavior.


2009 ◽  
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S.M. Seutter ◽  
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1985 ◽  
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2014 ◽  
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pp. 142108 ◽  
Author(s):  
Patrick Fiorenza ◽  
Alessia Frazzetto ◽  
Alfio Guarnera ◽  
Mario Saggio ◽  
Fabrizio Roccaforte

2011 ◽  
Vol 99 (2) ◽  
pp. 023107 ◽  
Author(s):  
Takashi Ikuno ◽  
Hirotaka Okamoto ◽  
Yusuke Sugiyama ◽  
Hideyuki Nakano ◽  
Fumihiko Yamada ◽  
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Ryouta Sasajima ◽  
Hideki Matsumura

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