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Nonthermal Plasma-Enhanced Chemical Vapor Deposition of Two-Dimensional Molybdenum Disulfide
ACS Omega
◽
10.1021/acsomega.0c02947
◽
2020
◽
Vol 5
(34)
◽
pp. 21853-21861
Author(s):
Chad A. Beaudette
◽
Jacob T. Held
◽
K. Andre Mkhoyan
◽
Uwe R. Kortshagen
Keyword(s):
Chemical Vapor Deposition
◽
Molybdenum Disulfide
◽
Vapor Deposition
◽
Chemical Vapor
◽
Nonthermal Plasma
◽
Two Dimensional
Download Full-text
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