Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication
Oxygen plasmas feature certain properties that make them attractive not only for material removal via etching and sputtering, but also for driving and sustaining nucleation and growth of various nanostructures in plasma bulk and on plasma-exposed surfaces.
1983 ◽
Vol 41
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pp. 270-271
1970 ◽
Vol 28
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pp. 414-415
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1978 ◽
Vol 36
(1)
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pp. 454-455
1988 ◽
Vol 46
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pp. 800-801
Keyword(s):
1984 ◽
Vol 42
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pp. 428-429
1988 ◽
Vol 46
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pp. 626-627
1985 ◽
Vol 43
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pp. 52-53
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1992 ◽
Vol 50
(2)
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pp. 1102-1103
1985 ◽
Vol 43
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pp. 268-269