scholarly journals Electron-induced fragmentation mechanisms in organic monomers and their implications for photoresist optimization for EUV lithography

2021 ◽  
Vol 23 (15) ◽  
pp. 9228-9234
Author(s):  
Ashish Rathore ◽  
Maicol Cipriani ◽  
Ching-Chung Huang ◽  
Lionel Amiaud ◽  
Céline Dablemont ◽  
...  

The electron-induced fragmentation mechanisms of two important EUV-photoresist monomers methyl isobutyrate and methacrylic acid are investigated in the film and gas-phases.

2015 ◽  
Vol 53 (2) ◽  
Author(s):  
Tran Vu Thang ◽  
Pham Thi Thu Ha ◽  
Nguyen Van Khoi ◽  
Nguyen Van Manh ◽  
Pham Thi Thu Trang

Author(s):  
Maryam Bakhshizadeh ◽  
Ameneh Sazgarnia ◽  
Mahmoud Seifi ◽  
Farzin Hadizadeh ◽  
Ghadir Rajabzadeh ◽  
...  

1993 ◽  
Vol 58 (1) ◽  
pp. 71-76 ◽  
Author(s):  
Minmin Tian ◽  
C. Ramireddy ◽  
Stephen E. Webber ◽  
Petr Munk

No anomalies were observed during the measurement of sedimentation coefficients of block copolymer micelles formed by copolymers of styrene and methacrylic acid in a mixed solvent; 80 vol.% of dioxane and 20 vol.% of water. The shapes of the sedimenting boundaries suggest that the size heterogeneity of the micelles is small. Linear relations between 1/s and c were obtained. The value of the hydrodynamic coefficient κ was between 2 and 4 in a good agreement with the value 2.75 or 2.86 that was obtained by combining Burgers' or Fixman's values of the coefficient of the concentration dependence kvs for hard spheres with Einstein's value of [η] for spheres.


1989 ◽  
Vol 54 (11) ◽  
pp. 3011-3024 ◽  
Author(s):  
Vlastimil Fidler ◽  
Stefan Vajda ◽  
Zuzana Limpouchová ◽  
Jiří Dvořák ◽  
Karel Procházka ◽  
...  

The methodology of polarization time-resolved fluorometry and interpretation of its results are outlined at a general level, and the measurement on and use of facilities of the Edinburgh Instruments Model 299T apparatus are discussed in detail. The dynamics of conformational changes in chains of poly(methacrylic acid) containing covalently bonded dansyl labels are studied in aqueous solutions at various pH. It is shown that at pH > 6, the shorter effective rational correlation time τr < 2 ns corresponds to the rotation of the free dansyl label about bonds by which it is attached to the polymeric chain; at pH < 4 the longer effective rational correlation time τr = 20-26 ns corresponds to the rotation of the compact spherical formation constituted by a part of the collapsed polymeric chain in which the label is fixed and whose relative molecular mass is approx. 15 000-20 000.


2004 ◽  
Vol 76 (1) ◽  
pp. 147-155 ◽  
Author(s):  
M. Musso ◽  
F. Matthai ◽  
D. Keutel ◽  
K.-L. Oehme

Isotropic Raman line shapes of simple molecular fluids exhibit critical line broadening near their respective liquid-gas critical points. In order to observe this phenomenon, it is essential that the band position of a given vibrational mode is density-dependent, and that vibrational depopulation processes negligibly contribute to line broadening. Special attention was given to the fact that the isotropic (i.e., nonrotationally broadened) line shape of liquid N2 is affected by resonant intermolecular vibrational interactions between identical oscillators. By means of the well-chosen isotopic mixture (14N2).975 - (14N15N).025, the temperature and density dependences of shift, width, and asymmetry of the resonantly coupled 14N2 and, depending on the S/N ratio available, of the resonantly uncoupled 14N15N were determined, with up to milli-Kelvin resolution, in the coexisting liquid and gas phases and along the critical isochore, using a highest-resolution double monochromator and modern charge-coupled device detection techniques. Clear evidence was found that vibrational resonance couplings are present in all dense phases studied.


2021 ◽  
pp. 116106
Author(s):  
Iftikhar Hussain ◽  
Zahoor H. Farooqi ◽  
Faisal Ali ◽  
Robina Begum ◽  
Ahmad Irfan ◽  
...  

Soft Matter ◽  
2021 ◽  
Author(s):  
Aliaksei Aliakseyeu ◽  
Victoria Albright ◽  
Danielle Yarbrough ◽  
Samantha Hernandez ◽  
Qing Zhou ◽  
...  

This work establishes a correlation between the selectivity of hydrogen-bonding interactions and the functionality of micelle-containing layer-by-layer (LbL) assemblies. Specifically, we explore LbL films formed by assembly of poly(methacrylic acid)...


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