Effect of back‐surface polycrystalline silicon layer on oxygen precipitation in Czochralski silicon wafers
Keyword(s):
1997 ◽
Vol 144
(3)
◽
pp. 1111-1120
◽
2015 ◽
Vol 242
◽
pp. 135-140
◽
2011 ◽
Vol 178-179
◽
pp. 249-252
◽
2011 ◽
Vol 159
(2)
◽
pp. H125-H129
◽
Keyword(s):
2006 ◽
Vol 376-377
◽
pp. 169-172
◽
1991 ◽
Vol 30
(Part 2, No. 4B)
◽
pp. L757-L760
Keyword(s):
2012 ◽
Vol 407
(15)
◽
pp. 2993-2997
◽