Thermal stability and electrical characteristics of ultrathin hafnium oxide gate dielectric reoxidized with rapid thermal annealing
1991 ◽
Vol 6
(3)
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pp. 193-195
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Keyword(s):
2005 ◽
Vol 244
(1-4)
◽
pp. 444-448
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1986 ◽
Vol 19
(3)
◽
pp. L43-L47
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2003 ◽
Vol 43
(8)
◽
pp. 1289-1293
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Keyword(s):