Atmospheric pressure plasma chemical vapor deposition system for high-rate deposition of functional materials
2000 ◽
Vol 71
(8)
◽
pp. 3173-3177
◽
2006 ◽
Vol 45
(4B)
◽
pp. 3592-3597
◽
2013 ◽
Vol 31
(6)
◽
pp. 061508
◽
1999 ◽
Vol 65
(11)
◽
pp. 1600-1604
◽
2004 ◽
Vol 70
(8)
◽
pp. 1075-1079
2000 ◽
Vol 66
(10)
◽
pp. 1636-1640