Effect of hydrogen on the structure of high-rate deposited SiC on Si by atmospheric pressure plasma chemical vapor deposition using high-power-density condition
2000 ◽
Vol 71
(8)
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pp. 3173-3177
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2004 ◽
Vol 70
(8)
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pp. 1075-1079
2000 ◽
Vol 66
(10)
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pp. 1636-1640
2003 ◽
Vol 444
(1-2)
◽
pp. 138-145
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2000 ◽
Vol 66
(6)
◽
pp. 907-911
2006 ◽
Vol 45
(4B)
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pp. 3592-3597
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2013 ◽
Vol 31
(6)
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pp. 061508
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