Effects of fluorine incorporation into HfO2 gate dielectrics on InP and In0.53Ga0.47As metal-oxide-semiconductor field-effect-transistors
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2004 ◽
Vol 33
(8)
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pp. 912-915
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2010 ◽
Vol 54
(9)
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pp. 919-924
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2007 ◽
Vol 46
(1)
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pp. 7-13
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2010 ◽
Vol 28
(3)
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pp. C3H14-C3H17
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