Vanadium oxide thin films deposited on indium tin oxide glass by radio-frequency magnetron sputtering

Chinese Physics ◽

10.1088/1009-1963/11/7/317 ◽

2002 ◽

Vol 11 (7) ◽

pp. 737-740 ◽

Author(s):

Wang Xue-Jin ◽

Fei Yun-Jie ◽

Xiong Yan-Yun ◽

Nie Yu-Xin ◽

Feng Ke-An ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Vanadium Oxide ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Glass ◽

Radio Frequency Magnetron Sputtering ◽

Vanadium Oxide Thin Films ◽

Indium Tin Oxide Glass

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Effect of O2 concentration on metal–insulator transition properties of vanadium oxide thin films prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.03.066 ◽

2007 ◽

Vol 515 (20-21) ◽

pp. 7740-7743 ◽

Author(s):

Jang Woo Lee ◽

Su Ryun Min ◽

Han Na Cho ◽

Chee Won Chung

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Vanadium Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Metal Insulator Transition ◽

Metal Insulator ◽

O2 Concentration ◽

Vanadium Oxide Thin Films

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Highly Transparent Conducting Indium Tin Oxide Thin Films Prepared by Radio Frequency Magnetron Sputtering and Thermal Annealing

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2019.16242 ◽

2019 ◽

Vol 19 (3) ◽

pp. 1455-1462 ◽

Author(s):

Bhaskar Parida ◽

Youngun Gil ◽

Hyunsoo Kim

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Thermal Annealing ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Transparent Conducting

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(400)-Oriented indium tin oxide thin films with high mobility and figure of merit prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2020.137972 ◽

2020 ◽

Vol 704 ◽

pp. 137972 ◽

Author(s):

Ajinkya Bhorde ◽

Ashok Jadhavar ◽

Ravindra Waykar ◽

Shruthi Nair ◽

Haribhau Borate ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Figure Of Merit ◽

High Mobility ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films

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Structural and optical properties of BaxSr1−xTiO3 thin films on indium tin oxide/quartz substrates prepared by radio-frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.2202094 ◽

2006 ◽

Vol 99 (11) ◽

pp. 114904 ◽

Author(s):

W. J. Leng ◽

C. R. Yang ◽

J. H. Zhang ◽

H. W. Chen ◽

H. Ji ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Structural And Optical Properties ◽

Quartz Substrates

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Preparation of Vanadium Oxide Thin Films by Radio-Frequency Magnetron Sputtering

Journal of the Ceramic Society of Japan ◽

10.2109/jcersj.100.1390 ◽

1992 ◽

Vol 100 (1168) ◽

pp. 1390-1393 ◽

Author(s):

Yong-Su OH ◽

Yuichi WATANABE ◽

Masasuke TAKATA

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Vanadium Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Vanadium Oxide Thin Films

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Radio frequency magnetron sputtering growth and characterization of indium-tin oxide (ITO) thin films for NO2 gas sensors

Sensors and Actuators ◽

10.1016/0250-6874(88)87013-6 ◽

1988 ◽

Vol 15 (3) ◽

pp. 235-242 ◽

Author(s):

G. Sberveglieri ◽

S. Groppelli ◽

G. Coccoli

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Gas Sensors ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

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Effect of hydrogen partial pressure on optoelectronic properties of indium tin oxide thin films deposited by radio frequency magnetron sputtering method

Journal of Applied Physics ◽

10.1063/1.370834 ◽

1999 ◽

Vol 86 (2) ◽

pp. 974-980 ◽

Author(s):

Keran Zhang ◽

Furong Zhu ◽

C. H. A. Huan ◽

A. T. S. Wee

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Partial Pressure ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Hydrogen Partial Pressure ◽

Optoelectronic Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Room temperature ammonia gas sensing characteristics of copper oxide-tin oxide composite thin films prepared by radio frequency magnetron sputtering technique

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-020-04353-z ◽

2020 ◽

Vol 31 (20) ◽

pp. 18018-18036

Author(s):

S. R. Cynthia ◽

R. Sivakumar ◽

C. Sanjeeviraja ◽

C. Gopalakrishnan ◽

K. Jeyadheepan

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Copper Oxide ◽

Tin Oxide ◽

Room Temperature ◽

Gas Sensing ◽

Radio Frequency Magnetron Sputtering ◽

Ammonia Gas ◽

Sensing Characteristics

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Electrical and optical properties of indium tin oxide films prepared on plastic substrates by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.05.093 ◽

2008 ◽

Vol 516 (8) ◽

pp. 1984-1991 ◽

Author(s):

Chih-hao Yang ◽

Shih-chin Lee ◽

Tien-chai Lin ◽

Suz-cheng Chen

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Plastic Substrates ◽

Tin Oxide Films

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Ferroelectric properties, morphologies, and leakage currents of Bi[sub 0.97]La[sub 0.03]FeO[sub 3] thin films deposited on indium tin oxide/glass substrates

Journal of Applied Physics ◽

10.1063/1.2975321 ◽

2008 ◽

Vol 104 (7) ◽

pp. 076103 ◽

Author(s):

J. Yan ◽

G. D. Hu ◽

X. M. Chen ◽

W. B. Wu ◽

C. H. Yang

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Ferroelectric Properties ◽

Oxide Glass ◽

Leakage Currents ◽

Glass Substrates ◽

Indium Tin Oxide Glass

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