scholarly journals Effects of surface plasma treatment on threshold voltage hysteresis and instability in metal-insulator-semiconductor (MIS) AlGaN/GaN heterostructure HEMTs

2018 ◽  
Vol 123 (18) ◽  
pp. 184503 ◽  
Author(s):  
Z. H. Zaidi ◽  
K. B. Lee ◽  
J. W. Roberts ◽  
I. Guiney ◽  
H. Qian ◽  
...  
2019 ◽  
Vol 7 (29) ◽  
pp. 8855-8860 ◽  
Author(s):  
Janghyuk Kim ◽  
Marko J. Tadjer ◽  
Michael A. Mastro ◽  
Jihyun Kim

The threshold voltage of β-Ga2O3 metal–insulator–semiconductor field-effect transistors is controlled via remote fluorine plasma treatment, enabling an enhancement-mode operation under double gate condition.


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