Biaxial FBAR Magnetic Sensor Based on Fe80Ga20 Anisotropic ΔE Effect

2021 ◽  
Author(s):  
Xiaofan Yun ◽  
Wenkui Lin ◽  
Rui Hu ◽  
Xiaoyi Wang ◽  
Zhongming Zeng ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Resonant Frequency ◽  
Acoustic Resonator ◽  
Magnetic Sensor ◽  
Consumer Electronics ◽  
Magnetic Sensors ◽  
Linear Temperature ◽  
Out Of Plane ◽  
Film Bulk ◽  
Δe Effect

Abstract With the increasing application of personal navigation system in consumer electronics, the demand for multi-axis magnetic sensors based on MEMS is growing. We report a biaxial MEMS DC magnetic sensor consisting of an Mo/AlN/Fe80Ga20 film bulk acoustic resonator (FBAR), with anisotropy ΔE effect-based sensing principle. Different from the previously reported one-dimensional magnetic sensor based on the ΔE effect, the anisotropic ΔE effect was used to realize in-plane and out-of-plane two-dimensional magnetic field responses on a discrete sensor, and the sensor had two readout methods: resonant frequency f and return loss S11. The magnetic sensor realized the resonant frequency f shifted by 1.03 MHz and 0.2 MHz in the 567 Oe in-plane magnetic field and 720 Oe out-of-plane magnetic field, respectively, and the S11 changes by -30.2 dB and -0.92 dB. As the applied magnetic field increases, the -3 dB bandwidth quality factor Q3dB of the S11 curve gradually increases, and its maximum values in the in-plane and out-of-plane magnetic fields are 77143 and 1828, respectively, which reduces the detection limit of the magnetic sensor. The resonant magnetic sensor has stable high linear temperature and frequency drift characteristics, and its temperature frequency coefficient is -48.7 ppm/℃.

scholarly journals AC Magnetic sensor to measure mega-amps current and kilo-tesla magnetic fields up to gigahertz frequencies

2020 ◽  
Vol 1 (1) ◽  
pp. 36-44
Author(s):  
Javier Lopez Segura ◽  
Nicolas Urgoiti
Keyword(s):  
Magnetic Field ◽  
Magnetic Fields ◽  
High Speed ◽  
High Strength ◽  
Simulation Software ◽  
Alpha Particles ◽  
Magnetic Sensor ◽  
Magnetic Sensors ◽  
Design Build ◽  
Z Pinch

An AC magnetic sensor is presented for measuring the high speed and high strength magnetic field generated in Z-pinch fusion machines. The proposed magnetic sensor provides the measurement of magnetic fields across a broadband frequency range. The simulation of magnetic probe is presented using a SPICE simulation software LTspice. The magnetic sensors are installed in a Pulsotron-3 Z-pinch machine and measured performance of the sensor are presented. This sensor also can be used to check the ignition conditions of the Z-Pinch by measuring the magnetic field generated by the output streams of large number of reacted alpha particles. The equations for measuring non-stationary magnetic field due to rapidly varying electric currents and a LTspice simulation file are provided to help the engineers to design, build, and install this kind of sensors.

scholarly journals The Effect of Arrive Angle of External Magnetic Field on The Shape of Hysteresis Curve Permalloy Ni80Fe20 By Simulation

2021 ◽  
Vol 4 (2) ◽  
pp. 102
Author(s):  
Merinda Lestari ◽  
Widia Nursiyanto ◽  
Agung Tjahjo Nugroho
Keyword(s):  
Magnetic Field ◽  
External Magnetic Field ◽  
Finite Difference ◽  
Coercive Field ◽  
Incident Angle ◽  
Magnetic Sensor ◽  
Magnetic Sensors ◽  
Hysteresis Curve ◽  
Angle Of Incidence ◽  
Angle Variation

Magnetic sensor is a type of sensor that utilizes changes in resistance caused by changes in the magnetic field H or B. One of the suitable magnetic materials to be used as a study material for making magnetic sensors is permalloy Ni80Fe20. The reading error of the magnetic sensor of the Ni80Fe20 permalloy material affects hysteresis curve of the material and requires correction of the angle of incidence of the external magnetic field in order to provide accurate results on the storage media. In this our current research using Finite Difference OOMMF, we investigated the effect of the angle of incidence of the external magnetic field (H) on the hysteresis curve was carried out on an application based on. The research was conducted by reviewing the parameter literature of the Ni80Fe20 permalloy material and then compiling it in a script and simulating it on an application based on Finite Difference OOMMF. The data obtained from the simulation are normalized magnetization (m), external magnetic field H and coercivity field (Hc) which have been influenced by the angle of incidence. The results of the hysteresis curve at a size of 5 nm with a variation of the angle of incidence 0o are indicated by the value of the external magnetic field H of 10000 mT to -10000 mT with a coercive field Hc of 5000 mT to -5000 mT. The normalized magnetization value m is 1 to -1. The variation of the angle of incidence of 30o produces a coercive field Hc of -108.3 mT to 108.3 mT and a normalized magnetization of 0.86 to -0.86. The 45o incident angle variation produces a coercive field Hc -88.4 mT to 88.4 mT and a normalized magnetization of -0.7 to 0.7

scholarly journals Indoor Positioning Using Magnetic Fingerprint Map Captured by Magnetic Sensor Array

Sensors ◽  
2021 ◽  
Vol 21 (17) ◽  
pp. 5707
Author(s):  
Ching-Han Chen ◽  
Pi-Wei Chen ◽  
Pi-Jhong Chen ◽  
Tzung-Hsin Liu
Keyword(s):  
Magnetic Field ◽  
Sensor Array ◽  
Probabilistic Neural Network ◽  
Indoor Positioning ◽  
Magnetic Sensor ◽  
Magnetic Sensors ◽  
Positioning System ◽  
Positioning Accuracy ◽  
Positioning Method ◽  
The Magnetic Field

By collecting the magnetic field information of each spatial point, we can build a magnetic field fingerprint map. When the user is positioning, the magnetic field measured by the sensor is matched with the magnetic field fingerprint map to identify the user’s location. However, since the magnetic field is easily affected by external magnetic fields and magnetic storms, which can lead to “local temporal-spatial variation”, it is difficult to construct a stable and accurate magnetic field fingerprint map for indoor positioning. This research proposes a new magnetic indoor positioning method, which combines a magnetic sensor array composed of three magnetic sensors and a recurrent probabilistic neural network (RPNN) to realize a high-precision indoor positioning system. The magnetic sensor array can detect subtle magnetic anomalies and spatial variations to improve the stability and accuracy of magnetic field fingerprint maps, and the RPNN model is built for recognizing magnetic field fingerprint. We implement an embedded magnetic sensor array positioning system, which is evaluated in an experimental environment. Our method can reduce the noise caused by the spatial-temporal variation of the magnetic field, thus greatly improving the indoor positioning accuracy, reaching an average positioning accuracy of 0.78 m.

Tuning Resonance Frequency of Spin Wave Localized in an Isolated Skyrmion by Magnetoelectric Couplings

SPIN ◽  
2019 ◽  
Vol 09 (03) ◽  
pp. 1950009 ◽  
Author(s):  
Rongzhi Zhao ◽  
Wenchao Chen ◽  
Chenglong Hu ◽  
Luyang Chen ◽  
Jian Zhang ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Resonant Frequency ◽  
Total Energy ◽  
Average Energy ◽  
Spin Transfer Torque ◽  
Spin Transfer ◽  
Integer Multiple ◽  
External Perturbations ◽  
Out Of Plane ◽  
Oscillation Frequencies

Understanding the dynamic behavior of an isolated skyrmion with external perturbations has been obstructed due to the difficulty in experimentally observing such an instantaneous phenomenon within picoseconds. Herein, we theoretically investigated the spin-transfer-torque-induced dynamics of an isolated skyrmion excited by external nanosecond-pulse perturbations. It is found that a redshift of the resonant frequency appears under a pulse polarized current with [Formula: see text][Formula: see text]A/m2 and [Formula: see text][Formula: see text]GHz, while a blueshift is presented under a combined perturbation of the pulse polarized current and an out-of-plane ac magnetic field. The physic origins of the redshift and the blueshift are ascribed to the increased average energy of system from [Formula: see text][Formula: see text]J to [Formula: see text][Formula: see text]J and integer multiple (twofold and fourfold) oscillation frequencies of total energy, respectively. The present study could thus provide an insight to the micromagnetic dynamics of skyrmion under the magnetoelectric couplings.

Shielding of Directional Magnetic Sensor Readings in a Measurement While Drilling Tool for Oil Well Positioning

2005 ◽  
Vol 128 (4) ◽  
pp. 343-345 ◽  
Author(s):  
Per A. Amundsen ◽  
Torgeir Torkildsen ◽  
Arild Saasen
Keyword(s):  
Magnetic Field ◽  
Magnetic Fields ◽  
Magnetic Materials ◽  
Explicit Solution ◽  
Drilling Fluid ◽  
Magnetic Sensor ◽  
Magnetic Sensors ◽  
Oil Well ◽  
Drilling Tool ◽  
Measurement While Drilling

Magnetic materials in the drilling fluid used for drilling a petroleum well can significantly shield the Earth’s magnetic field as measured by magnetic sensors inside the drilling pipe. This has been shown to sometimes cause significant errors in the accuracy of borehole positioning using magnetic surveying. In this paper we present a physical approach for correcting the measured magnetic fields for such shielding. An explicit solution of the shielding problem is derived for the simplest case of a magnetic sensor on the axis of the borehole.

scholarly journals Imperceptible magnetic sensor matrix system integrated with organic driver and amplifier circuits

2020 ◽  
Vol 6 (4) ◽  
pp. eaay6094 ◽  
Author(s):  
M. Kondo ◽  
M. Melzer ◽  
D. Karnaushenko ◽  
T. Uemura ◽  
S. Yoshimoto ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Real Time ◽  
Magnetic Sensor ◽  
Magnetic Sensors ◽  
Shift Register ◽  
Physical Interaction ◽  
Matrix System ◽  
Position Sensing ◽  
The Matrix ◽  
Time Encoding

Artificial electronic skins (e-skins) comprise an integrated matrix of flexible devices arranged on a soft, reconfigurable surface. These sensors must perceive physical interaction spaces between external objects and robots or humans. Among various types of sensors, flexible magnetic sensors and the matrix configuration are preferable for such position sensing. However, sensor matrices must efficiently map the magnetic field with real-time encoding of the positions and motions of magnetic objects. This paper reports an ultrathin magnetic sensor matrix system comprising a 2 × 4 array of magnetoresistance sensors, a bootstrap organic shift register driving the sensor matrix, and organic signal amplifiers integrated within a single imperceptible platform. The system demonstrates high magnetic sensitivity owing to the use of organic amplifiers. Moreover, the shift register enabled real-time mapping of 2D magnetic field distribution.

Finite element modeling and simulation of ultrasensitive film bulk acoustic resonator enabled by micropillar structure

2021 ◽  
pp. 2140007
Author(s):  
Jie Peng ◽  
Haoran Niu ◽  
Jinlin Liu ◽  
Ya-Nan Yang ◽  
Junze Zhu ◽  
...  
Keyword(s):  
Finite Element ◽  
Resonant Frequency ◽  
Frequency Shift ◽  
Acoustic Resonator ◽  
Optimized Design ◽  
Nonlinear Frequency ◽  
Mass Sensitivity ◽  
Resonant Frequency Shift ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

Portable and ultra-sensitive film bulk acoustic resonator (FBAR) is a promising device to satisfy the requirement of detecting gas and biological molecule. In this work, a novel sensing device was developed to achieve ultrahigh sensitivity, by coupling polymer micropillars with a FBAR substrate to form a two-degrees-of-freedom resonance system (FBAR-micropillars). We systematically investigated the effects of micropillar structure on the characteristics of FBAR-micropillars device by finite element method (FEM). It was found that the resonant frequency shift increased with increasing the height of micropillars (h) within a certain range, and the FBAR-micropillars device displayed nonlinear frequency response, which was opposite to the linear response of conventional FBAR devices. In addition, a positive resonant frequency shift was captured near the “coupled resonant point” of the FBAR-micropillars device. The geometric parameters of micropillars, including micropillar diameter and micropillar spacing could also cause a change of Q-factor and mass sensitivity. The optimized design of the proposed device achieved a threefold improvement in sensitivity relative to conventional FBAR without pillars, suggesting a feasible method to improve the mass sensitivity of acoustic resonators.

scholarly journals Structure and 3-D Model of a Solid State Thin-Film Magnetic Sensor

2021 ◽  
Vol 22 (3) ◽  
pp. 444-452
Author(s):  
G.I. Barylo ◽  
R.L. Holyaka ◽  
T.A. Marusenkova ◽  
M.S. Ivakh
Keyword(s):  
Magnetic Field ◽  
Thin Film ◽  
Solid State ◽  
Field Vector ◽  
Magnetic Sensor ◽  
Magnetic Sensors ◽  
Magnetic Tracking ◽  
Magnetic Field Mapping ◽  
Hall Sensors ◽  
D Model

Vector 3-D magnetic sensors form the basis of measurement devices for magnetic field mapping and magnetic tracking. Typically, such sensors utilize specific constructions based on split Hall structures (SHS). An SHS-based 3-D magnetic sensor is a bulk semiconductor integrated structure with 8 or more contacts. Combining current flow directions through the contacts and measuring the corresponding voltages, one defines projections BX, BY, BZ of the magnetic field vector. This work presents a novel design of 3-D solid state magnetic sensors that requires no insulation by p-n junctions and can be implemented by thin-film technology traditionally used for fabrication of Hall sensors including those based on InSb films. Besides, a SPICE model of the 3-D magnetic sensor is provided, which helps design the proposed sensor and refine techniques of its calibration.

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