scholarly journals Nanoscale wafer patterning using SPM induced local anodic oxidation in InP substrates

2021 ◽  
Author(s):  
Charlotte Ovenden ◽  
Ian Farrer ◽  
Maurice S Skolnick ◽  
Jon Heffernan
Keyword(s):  
Anodic Oxidation ◽  
Scanning Probe Microscopy ◽  
Oxidation Mechanism ◽  
Scanning Probe ◽  
Atomic Force ◽  
Nano Oxide ◽  
Local Anodic Oxidation ◽  
Semiconductor Fabrication ◽  
P Type ◽  
Inp Substrates

Abstract Scanning probe microscopy assisted local anodic oxidation offers advantages over other semiconductor fabrication techniques as it is a low contamination method. We demonstrate the fabrication of deep and highly reproducible nanohole arrays on InP using local anodic oxidation. Nanohole and nano-oxide mound radius and depth are controlled independently by altering atomic force microscope tip bias and humidity, with a maximum nanohole depth of 15.6 ± 1.2 nm being achieved. Additionally, the effect of tip write speed on oxide line formation is compared for n-type, p-type and semi-insulating substrates, which shows that n-type InP oxidises at a slower rate that semi-insulated or p-type InP. Finally, we calculate the activation energy for LAO of semi-insulating InP to be 0.4 eV, suggesting the oxidation mechanism is similar to that which occurs during plasma oxidation.

SCANNING PROBE MICROSCOPY BASED NANOSCALE PATTERNING AND FABRICATION

COSMOS ◽  
2007 ◽  
Vol 03 (01) ◽  
pp. 1-21 ◽  
Author(s):  
XIAN NING XIE ◽  
HONG JING CHUNG ◽  
ANDREW THYE SHEN WEE
Keyword(s):  
Integrated Circuits ◽  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Scanning Tunneling ◽  
Tunneling Microscopy ◽  
Force Microscopy ◽  
Nanoscale Patterning ◽  
Atomic Force ◽  
Probe Microscope ◽  
Molecular Manipulation

Nanotechnology is vital to the fabrication of integrated circuits, memory devices, display units, biochips and biosensors. Scanning probe microscope (SPM) has emerged to be a unique tool for materials structuring and patterning with atomic and molecular resolution. SPM includes scanning tunneling microscopy (STM) and atomic force microscopy (AFM). In this chapter, we selectively discuss the atomic and molecular manipulation capabilities of STM nanolithography. As for AFM nanolithography, we focus on those nanopatterning techniques involving water and/or air when operated in ambient. The typical methods, mechanisms and applications of selected SPM nanolithographic techniques in nanoscale structuring and fabrication are reviewed.

Measurement of Plasticity Gradients with Scanning Probe Microscopy

1993 ◽  
Vol 318 ◽  
Author(s):  
James D. Kiely ◽  
Dawn A. Bonnell
Keyword(s):  
Fracture Surface ◽  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Scanning Tunneling ◽  
Ceramic System ◽  
Force Microscopy ◽  
Metal Fracture ◽  
Atomic Force ◽  
Metal Ceramic

ABSTRACTScanning Tunneling and Atomic Force Microscopy were used to characterize the topography of fractured Au /sapphire interfaces. Variance analysis which quantifies surface morphology was developed and applied to the characterization of the metal fracture surface of the metal/ceramic system. Fracture surface features related to plasticity were quantified and correlated to the fracture energy and energy release rate.

Block Copolymer Microdomain Morphologies by Phase Detection Imaging

1996 ◽  
Vol 461 ◽  
Author(s):  
Ph. Leclère ◽  
J. M. Yu ◽  
R. Lazzaroni ◽  
Ph. Dubois ◽  
R. JéRôme ◽  
...  
Keyword(s):  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Phase Detection ◽  
Surface Phase ◽  
Force Microscopy ◽  
Microscopy Technique ◽  
Atomic Force ◽  
Different Types ◽  
Microdomain Structure ◽  
Thermodynamic Processes

ABSTRACTAtomic Force Microscopy with Phase Detection Imaging is used to study the surface microdomain morphology of thick (i.e., ca. 2 mm) films of triblock copolymers, such as polymethylmethacrylate - block - polybutadiene - block - polymethylmethacrylate copolymers prepared by a well-taylored two-step sequential copolymerization promoted by a 1,3-diisopropenylbenzene based difunctional anionie initiator. By means of this new scanning probe microscopy technique, it is shown that the surface exhibits a segregated microphase structure, corresponding to the different types of components predicted theoretically by thermodynamic processes. We investigate the relationships between the size and characteristics of the microdomain structure as a function of the molecular parameters of the constituent polymers. Our data illustrate the interest of Phase Detection Imaging in the elucidation of surface phase separation in block copolymers.

Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application

1999 ◽  
Vol 123 (1) ◽  
pp. 35-43 ◽  
Author(s):  
D. Croft ◽  
G. Shed ◽  
S. Devasia
Keyword(s):  
High Precision ◽  
Scanning Probe Microscopy ◽  
High Speed ◽  
Scanning Probe ◽  
Optical Systems ◽  
Positioning Precision ◽  
Force Microscopy ◽  
Atomic Force ◽  
Vibration Compensation ◽  
Adverse Affects

This article studies ultra-high-precision positioning with piezoactuators and illustrates the results with an example Scanning Probe Microscopy (SPM) application. Loss of positioning precision in piezoactuators occurs (1) due to hysteresis during long range applications, (2) due to creep effects when positioning is needed over extended periods of time, and (3) due to induced vibrations during high-speed positioning. This loss in precision restricts the use of piezoactuators in high-speed positioning applications like SPM-based nanofabrication, and ultra-high-precision optical systems. An integrated inversion-based approach is presented in this article to compensate for all three adverse affects—creep, hysteresis, and vibrations. The method is applied to an Atomic Force Microscope (AFM) and experimental results are presented that demonstrate substantial improvements in positioning precision and operating speed.

Developments in Using Scanning Probe Microscopy To Study Molecules on Surfaces — From Thin Films and Single-Molecule Conductivity to Drug–Living Cell Interactions

2006 ◽  
Vol 59 (6) ◽  
pp. 359 ◽  
Author(s):  
Pall Thordarson ◽  
Rob Atkin ◽  
Wouter H. J. Kalle ◽  
Gregory G. Warr ◽  
Filip Braet
Keyword(s):  
Single Molecule ◽  
Scanning Probe Microscopy ◽  
Cell Interactions ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Tunnelling Microscopy ◽  
Molecule Surface

Scanning probe microscopy (SPM) techniques, including atomic force microscopy (AFM) and scanning tunnelling microscopy (STM), have revolutionized our understanding of molecule–surface interactions. The high resolution and versatility of SPM techniques have helped elucidate the morphology of adsorbed surfactant layers, facilitated the study of electronically conductive single molecules and biomolecules connected to metal substrates, and allowed direct observation of real-time processes such as in situ DNA hybridization and drug–cell interactions. These examples illustrate the power that SPM possesses to study (bio)molecules on surfaces and will be discussed in depth in this review.

Optimum KOH Wet Etching of Cantilever Tip for Better Image Captured by Nanoeducator

2011 ◽  
Vol 84-85 ◽  
pp. 392-395
Author(s):  
Agus Geter Edy Sutjipto ◽  
Waleed Fekry Faris ◽  
Erry Y.T. Adesta ◽  
Hafizah Hanim
Keyword(s):  
Scanning Probe Microscopy ◽  
Atomic Scale ◽  
Scanning Probe ◽  
Scanning Tunneling ◽  
Etching Time ◽  
Atomic Force ◽  
Measuring Techniques ◽  
Quality Image ◽  
Scanning Force ◽  
Microscopy Techniques

The development of the various scanning probe microscopy techniques has revolutionized the study of surface structure up to atomic scale. Among these techniques, Nanoeducator as scanning force microscope or SFM has been developed to allow the accomplishment of various measuring techniques both for scanning tunneling microscope (STM) and non-contact atomic force microscope (AFM). However, there is no exact guidance how to fabricate cantilever to gather the good image. In order to achieve the better cantilever for students, this paper emphasizes on tip’s processing by altering etching length parameter as tip plays an important role to achieve better quality image during scanning operation. This paper also provides a guide for undergraduate student to know better about this machine as well as the principle behind it for them to acquire better quality image for their works. It was found that the number of turning of tungsten and etching time could produce good tip of cantilever. It is recommended for lecturers, students and technician to consider about turning and time of etching to produce a better tip of cantilever in Nanoeducator.

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