scholarly journals Computer simulation of a power source based on a bipolar pulse shaper for magnetron sputtering systems

2021 ◽  
Vol 2061 (1) ◽  
pp. 012003
Author(s):  
AA Tyufanova
Keyword(s):  
Computer Simulation ◽  
Magnetron Sputtering ◽  
Power Supply ◽  
Power Source ◽  
Pulsed Power ◽  
Bipolar Pulse ◽  
Pulse Shaper ◽  
Electromagnetic Processes ◽  
The Stability ◽  
Sputtering System

Abstract The research object is a pulsed bipolar power supply based on a bipolar pulse shaper of increased frequency for magnetron sputtering systems. The research subject is the electrophysical and electromagnetic processes occurring in the bipolar pulse shaper when it is operated with a magnetron sputtering system, as well as the control characteristics. The purpose of the paper is the possibility of creating a pulsed power supply with a power of up to several tens of kW, which makes it possible to increase the stability of the magnetron sputtering system. Besides, the outcomes of computer simulation of a power source based on a bipolar pulse shaper and control algorithm ensuring its stable and reliable operation in association with a magnetron sputtering system are reflected in the paper. The results show that the deviation of the output control characteristics of the bipolar pulse shaper from the analytically obtained characteristics does not exceed 3%. Circuit modeling is carried out in the Swicher CAD/LTspice software package. The mathematical SPICE models of the field-effect STY112N65M5 transistor, transistor IGBT of IRF4PF50WD and STTH8006 diode are taken from the websites of STMicroelectronics and International Rectifier manufacturers.

Design and Implementation of Mid-Frequency Magnetron Sputtering Power Supply Based on TL494 and MCU

2013 ◽  
Vol 709 ◽  
pp. 408-412
Author(s):  
Yan Ling Zhao ◽  
Rong Xing Liu
Keyword(s):  
Magnetron Sputtering ◽  
Power Supply ◽  
Current Mode ◽  
Voltage Regulation ◽  
Control Circuit ◽  
Constant Current ◽  
Loop Control ◽  
Pulse Width Modulator ◽  
Digital Pulse ◽  
The Stability

Abstract. A mid-frequency magnetron sputtering (MFMS) power supply based on TL494 and MCU was introduced. A Buck Chopper and full bridge inverter were applied to the main circuit. The PWM controller TL494 was used in the Buck voltage-regulation control circuit to realize closed loop control. The drive signal of the IGBT in full bridge inverter was based on precise digital pulse width modulator (DPWM) signal produced by the MCU M30290. The DPWM can be set by potentiometer so the power supply can output the square wave with adjustable frequency and duty cycle. The power supply was operated in constant current mode. For micro or strong arcing of the target, different safeguards were adopted by the control circuit. At last, the system test and experimental results show that the stability, reliability and tuning range of the MFMS power supply can meet the requirements of the magnetron sputtering coating.

Structural Evolution Upon Annealing of Multi-Layer Si/Fe Thin Films Prepared by Magnetron Sputtering

2007 ◽  
Vol 561-565 ◽  
pp. 1161-1164
Author(s):  
Xiao Na Li ◽  
Bing Hu ◽  
Chuang Dong ◽  
Xin Jiang
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Structural Evolution ◽  
Radio Frequency Magnetron Sputtering ◽  
Transmission Electron ◽  
Direct Band ◽  
The Stability ◽  
Sputtering System

Fe/Si multi-layer films were fabricated on Si (100) substrates utilizing radio frequency magnetron sputtering system. Si/β-FeSi2 structure was found in the films after the deposition. Structural characterization of Fe-silicide sample was performed by transmission electron microscopy, to explore the dependence of the microstructure of β-FeSi2 film on the preparation parameters. It was found that β-FeSi2 particles were formed after the deposition without annealing, whose size is less than 20nm ,with a direct band-gap of 0.94eV in room temperature. After annealing at 850°C, particles grow lager, however the stability of thin films was still good.

Development of a Pulsed DC Power Supply for Generating Cold Plasma Jet

2013 ◽  
Vol 791-793 ◽  
pp. 1841-1844 ◽  
Author(s):  
Ye Lin Hu ◽  
Zhi Wen Du ◽  
Zhao Quan Chen
Keyword(s):  
Power Supply ◽  
Cold Plasma ◽  
Plasma Jet ◽  
Pulsed Power ◽  
Discharge Circuit ◽  
Pulsed Discharge ◽  
Pulsed Power Supply ◽  
Dc Power ◽  
Pulsed Dc ◽  
The Stability

This paper discusses a lithium battery-driven cold plasma jet at atmospheric pressure with a pulsed power supply of design and its simulation. H.V. DC(High voltage directed current) and pulsed discharge circuit comprise of the entire pulse power system. H.V. DC circuit using TIs TMS320F28335 chips as the core of the circuit control module, the chip improves the stability of the H.V.DC circuits. Pulsed discharge circuit design plays a crucial impact on the formation of the narrowed pulses. A new double pulsed discharge circuit is designed by the proposed program. As discharge experiment shown finally, the steep narrowed pulse of pulsed power supply can be used to stabilize the output of the pulsed front.

The Influence of the Power Supply of a Magnetron Sputtering System on the Properties of the Deposited TiO2 Films

2018 ◽  
Vol 54 (15) ◽  
pp. 1491-1497 ◽  
Author(s):  
N. F. Abramov ◽  
A. V. Bezrukov ◽  
O. D. Vol’pyan ◽  
Yu. A. Obod
Keyword(s):  
Magnetron Sputtering ◽  
Power Supply ◽  
Tio2 Films ◽  
Sputtering System

scholarly journals Methods and equipment for power supply of underwater vehicles

2021 ◽  
Vol 4 (398) ◽  
pp. 93-103
Author(s):  
Alexandr Martynov ◽  
◽  
Vadim Samsygin ◽  
Dmitry Sokolov ◽  
◽  
...  
Keyword(s):  
Computer Simulation ◽  
Power Supply ◽  
Analytical Methods ◽  
Energy Supply ◽  
Underwater Vehicles ◽  
Comparative Assessment ◽  
Electromagnetic Processes ◽  
Speed Up ◽  
Supply Systems ◽  
Energy Supply Systems

Object and purpose of research. The object of the work is the power supply systems of submersibles. The aim is to assess the characteristics of the submersible energy supply systems and find ways to improve them. Materials and methods. The study was conducted on the basis of analytical methods and computer simulation of electromagnetic processes of the systems of energy supply of submersibles. Main results. A comparative assessment of the characteristics of the main systems of energy supply of submersibles has been carried out. New ways and devices powering submersibles, developed methods for calculating these devices. Ways to improve the power supply systems of submersibles are shown. Conclusion. The results of the research allow us to identify ways to further improve the characteristics of the power supply systems of submersibles and to speed up the process of their implementation in practice.

AC Bipolar Pulsed Power Supply for Reactive Magnetron Sputtering

2011 ◽  
Vol 39 (10) ◽  
pp. 1983-1989 ◽  
Author(s):  
J. Garcia-Garcia ◽  
J. Pacheco-Sotelo ◽  
R. Valdivia-Barrientos ◽  
Carlos Rivera-Rodriguez ◽  
M. Pacheco-Pacheco ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Power Supply ◽  
Pulsed Power ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Pulsed Power Supply
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