scholarly journals Deposition of boron films using a discharge system with a hot boron anode

2021 ◽  
Vol 2064 (1) ◽  
pp. 012068
Author(s):  
V V Shugurov ◽  
Yu F Ivanov
Keyword(s):  
Hollow Cathode ◽  
Arc Discharge ◽  
Boron Powder ◽  
Discharge System ◽  
Powder Target ◽  
Current Voltage ◽  
Discharge Parameters ◽  
Current Voltage Characteristics ◽  
Anode Temperature

Abstract This work describes a discharge system for heating and evaporation of a boron powder target based on a non-self-sustained arc discharge with a filament, a hollow cathode and a hot combined anode. The measurements of the current-voltage characteristics of the discharge with a hot anode and the dependence of the anode temperature on the discharge parameters are presented. The modes of deposition of boron films have been determined.

scholarly journals Charge and elemental composition of plasma generated by sputtering of powder target from amorphous boron

2021 ◽  
Vol 2064 (1) ◽  
pp. 012042
Author(s):  
Y F Ivanov ◽  
V V Shugurov ◽  
O V Krysina ◽  
V E Prokopiev
Keyword(s):  
Elemental Composition ◽  
Plasma Potential ◽  
Charge Composition ◽  
Amorphous Boron ◽  
Boron Powder ◽  
Temperature Plasma ◽  
Discharge System ◽  
Powder Target ◽  
Ion Plasma ◽  
Boron Ions

Abstract One of the effective and widespread methods of surface hardening of metal products is an ion-plasma saturation of the surface of machine parts and mechanisms with various elements (nitrogen, oxygen, carbon). Less investigated method is the process of ion-plasma saturation of the metals and alloys surface with boron. The purpose of the present work is to develop a method for the formation and study of parameters (electron temperature, plasma potential and concentration), elemental and charge composition of plasma generated at sputtering of a target from amorphous boron powder. To achieve the stated goal, a discharge system with a hot anode made of powder boron, as well as a pulse arc evaporator with a hot cathode made of sintered boron powder, was developed, designed, created and tested. Charge and elemental composition of boron-containing plasma generated during powder target sputtering from amorphous boron are defined by optical spectrometry method. It is shown that the generated plasma contains mainly neutral atoms and single-charge boron ions, as well as iron, silicon, copper and argon particles.

Current–Voltage Characteristics of the Initial Stage of Arc Discharge in a High-Voltage Vacuum Diode

2019 ◽  
Vol 45 (6) ◽  
pp. 616-619
Author(s):  
S. G. Davydov ◽  
A. N. Dolgov ◽  
A. V. Korneev ◽  
R. Kh. Yakubov
Keyword(s):  
High Voltage ◽  
Arc Discharge ◽  
Vacuum Diode ◽  
Initial Stage ◽  
Current Voltage ◽  
Current Voltage Characteristics

Current-voltage characteristics of a reflex discharge with a hollow cathode and self-heating electrode

2001 ◽  
Vol 46 (3) ◽  
pp. 292-298 ◽  
Author(s):  
V. A. Kagadei ◽  
A. V. Kozyrev ◽  
I. V. Osipov ◽  
D. I. Proskurovskii
Keyword(s):  
Hollow Cathode ◽  
Self Heating ◽  
Current Voltage ◽  
Current Voltage Characteristics ◽  
Reflex Discharge
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