Dual damascene trench depth control by Irm/spl trade/: a novel interferometric endpoint system
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2018 ◽
Vol 24
(5)
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pp. 21-30
2010 ◽
Vol 36
(3)
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pp. 421-426
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2003 ◽
Vol 150
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pp. G58
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2019 ◽
Vol 26
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pp. 811-821
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2006 ◽
Vol 46
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pp. 1581-1586
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