Vertically-Stacked Silicon Nanosheet Field Effect Transistors at 3nm Technology Nodes
2011 ◽
Vol 50
(4)
◽
pp. 04DC16
◽
Keyword(s):
2011 ◽
Vol 50
(4S)
◽
pp. 04DC16
◽
2018 ◽
Vol 17
(4)
◽
pp. 1399-1409
Keyword(s):
1981 ◽
Vol 42
(C4)
◽
pp. C4-423-C4-432
◽
Keyword(s):