Virtual System for Sheet Resistance Measurement of Inkjet Printed Conductive Layers

2019 ◽  
Author(s):  
Georgi Todorov Nikolov ◽  
Elitsa Emilova Gieva ◽  
Boyanka Marinova Nikolova ◽  
Ivelina Nikolaeva Ruskova
Keyword(s):  
Sheet Resistance ◽  
Resistance Measurement ◽  
Virtual System ◽  
Sheet Resistance Measurement

Sheet Resistance Measurement of Non-Standard Cleanroom Materials Using Suspended Greek Cross Test Structures

2006 ◽  
Vol 19 (1) ◽  
pp. 2-9 ◽  
Author(s):  
S. Enderling ◽  
C.L.S. Smith ◽  
M.H. Dicks ◽  
J.T.M. Stevenson ◽  
M. Mitkova ◽  
...  
Keyword(s):  
Sheet Resistance ◽  
Resistance Measurement ◽  
Sheet Resistance Measurement ◽  
Cross Test

Accurate Sheet Resistance Measurement on Ultra-Shallow Profiles

2006 ◽  
Vol 912 ◽  
Author(s):  
Trudo H. Clarysse ◽  
Alain Moussa ◽  
Frederik Leys ◽  
Roger Loo ◽  
Wilfried Vandervorst ◽  
...  
Keyword(s):  
Sheet Resistance ◽  
State Of The Art ◽  
Resistance Measurement ◽  
Sheet Resistance Measurement

AbstractComparison of state-of-the-art zero-penetration sheet resistance tools on ultra-shallow Boron CVD layers on top of a medium doped As layer.

Analysis of low-energy boron implants in silicon

1985 ◽  
Vol 63 (6) ◽  
pp. 890-893 ◽  
Author(s):  
M. Simard-Normandin ◽  
C. Slaby
Keyword(s):  
Sheet Resistance ◽  
Mass Spectroscopy ◽  
Measurement Techniques ◽  
Low Energy ◽  
Resistance Measurement ◽  
Concentration Profiles ◽  
Secondary Ion Mass Spectroscopy ◽  
Sheet Resistance Measurement ◽  
Secondary Ion

Low-energy boron implants in silicon are analyzed using secondary-ion mass spectroscopy and standard junction and sheet-resistance measurement techniques. Implantation of 11B+ is compared with that of [Formula: see text]. The concentration profiles are compared with Linhard–Scharf–Schiott theory and improved range parameters are obtained.

Sheet resistance measurement on AlGaN/GaN wafers and dispersion study

2013 ◽  
Vol 109 ◽  
pp. 334-337 ◽  
Author(s):  
J. Lehmann ◽  
C. Leroux ◽  
M. Charles ◽  
A. Torres ◽  
E. Morvan ◽  
...  
Keyword(s):  
Sheet Resistance ◽  
Resistance Measurement ◽  
Sheet Resistance Measurement
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