Accurate Sheet Resistance Measurement on Ultra-Shallow Profiles
Keyword(s):
AbstractComparison of state-of-the-art zero-penetration sheet resistance tools on ultra-shallow Boron CVD layers on top of a medium doped As layer.
2006 ◽
Vol 19
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pp. 2-9
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2013 ◽
Vol 24
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pp. 062001
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2017 ◽
Vol 5
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pp. 60
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Keyword(s):
2019 ◽
Vol 58
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pp. 075503
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2013 ◽
Vol 109
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pp. 334-337
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2006 ◽
Vol 21
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pp. 437-442
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