Cu CMP Dishing in High Density Cu Pad for Fine Pitch Wafer-to-Wafer (W2W) Hybrid Bonding

Author(s):  
HongMiao Ji ◽  
King-Jien Chui
Keyword(s):  
Author(s):  
Kuniaki Sueoka ◽  
Sayuri Kohara ◽  
Akihiro Horibe ◽  
Fumiaki Yamada ◽  
Hiroyuki Mori ◽  
...  
Keyword(s):  

2009 ◽  
Vol 6 (1) ◽  
pp. 6-12 ◽  
Author(s):  
Arne Albertsen ◽  
Koji Koiwai ◽  
Kyoji Kobayashi ◽  
Tomonori Oguchi ◽  
Katsumi Aruga

This paper highlights the possible combination of technologies such as thick film screen printing, ink jet, and post-firing thin film processes in conjunction with laser-drilled fine vias to produce high-density, miniaturized LTCC substrates. To obtain the silver pattern on the inner layers, both conventional thick film printing and ink jet printing (using nano silver particle dispersed ink) were applied on the ceramic green sheets. The ink jet process made it possible to metallize fine lines with line/space = 30/30 μm. For interlayer connections, fine vias of 30 μm in diameter formed by UV laser were used. Then these sheets were stacked on top of each other and fired to obtain a base substrate. On this base substrate, fine copper patterns for flip chip mounting were formed by a thin film process. The surface finish consisted of a nickel passivation and a gold layer deposited by electroless plating. The combination of the three patterning processes for conducting traces and UV laser drilling of fine vias make it appear possible to realize fine pitch LTCC, for example, for flip chip device mounting.


2012 ◽  
Vol 2012 (DPC) ◽  
pp. 002251-002284 ◽  
Author(s):  
Gilbert Lecarpentier ◽  
Joeri De Vos

Higher density interconnection using 3-Dimensional technology implies a pitch reduction and the use of micro-bumps. The micro-bump size reduction has a direct impact on the placement accuracy needed on the die placement and flip chip bonding equipment. The paper presents a Die-to-Die and Die-to-Wafer, high accuracy, die bonding solution illustrated by the flip chip assembly of a large 2x2cm die consisting of 1 million 10 μm micro-bumps at 20 μm pitch


2016 ◽  
Vol 2016 (1) ◽  
pp. 000001-000006
Author(s):  
Masahiro Kyozuka ◽  
Tatsuro Yoshida ◽  
Noriyoshi Shimizu ◽  
Koichi Tanaka ◽  
Tetsuya Koyama

Abstract The current trend in the electronics industry is one of increased computing performance, combined with a seemingly unending demand for portability and increased miniaturization; this is especially evident in the significant changes to the semiconductor device. To sustain the performance-improvement trend without increasing total cost, the partitioning of single die into a multi-chip architecture is widely studied in industry. These partitioned chips are then integrated into a single system-in-package (SiP). However, partitioning a single die into multiple split die causes two major challenges. The first is that it creates the need for very high density die to die interconnection. This interconnection is needed to provide enough routing density between the multiple die. Based on design studies, it believes that 2μm line and 2μm space is required in the package substrate. The second challenge is created by the increase in the overall die size. After partitioning the single die, each resulting smaller die must have its own I/O circuits, and effectively increases the total die area. This increase is a penalty, as mobile devices have a limited package size. When comparing a conventional package on package (PoP), the SiP requires a higher pin count with a finer pitch connection between the die and the memory. This finer pitch is needed to have enough I/Os, but within a limited package size to support mobile devices. To overcome these challenges, the structure of i-THOP® with POP pad, named “i-THOP® with Die embedded +ReDestribution Layer(RDL) structure”, has been developed. Herein, i-THOP® (integrated Thin film High density Organic Package) is a type of high-density substrate A key aspect to development of Die embedded +RDL is forming the multiple redistribution layers (RDL) over die and the fine pitch via connection. To achieve this, the proper material set was selected based on stress simulations and basic experiments. Regarding the manufacturing process, a conventional printed-circuit board (PCB) production line was used to minimize production cost. This article reports the manufacturing process and characteristics of the structure.


Author(s):  
Makoto Katsurayama ◽  
Hirokazu Ito ◽  
Hisanori Akimaru ◽  
Tomoyuki Matsumoto ◽  
Hirokazu Sakakibara ◽  
...  
Keyword(s):  

1996 ◽  
Vol 65 (4) ◽  
pp. 343-347
Author(s):  
Ikuo Mori ◽  
Koichiro Atsumi
Keyword(s):  

Sign in / Sign up

Export Citation Format

Share Document