The radio frequency (RF) performances of MEMS suspended spiral inductor under high overload environments are studied. Firstly, a suspended spiral inductor and its MEMS surface micromachining process which is compatible with CMOS process are developed. Then, the mechanical responses and RF performances of the inductor are simulated by ANSYS and HFSS, respectively. The simulation results show that, as the overload increases, the inductance and quality factor decrease significantly when the frequency band is closed to the resonant frequency but have no significant change when the frequency band is much lower than resonant frequency; the resonant frequency of the suspended inductor decreases monotonically with the increase of overload. A modified lumped parameter model is utilized to illustrate the simulation results, which theoretically indicates that the substrate loss is more severe than the ohmic loss as the overload increases.
