All-elastomer in-plane MEMS capacitive tactile sensor for normal force detection
2011 ◽
Vol 131
(4)
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pp. 141-147
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2006 ◽
Vol 326-328
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pp. 1343-1346
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2009 ◽
Vol 2009.1
(0)
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pp. 111-112
1992 ◽
Vol 31
(1-3)
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pp. 115-120
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2015 ◽
Vol 25
(9)
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pp. 095009
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