A novel method for in situ thermal expansion coefficient measurement of polysilicon thin films

Author(s):  
Yuxing Zhang ◽  
Qing-An Huang ◽  
Weihua Li
Coatings ◽  
2020 ◽  
Vol 10 (7) ◽  
pp. 613 ◽  
Author(s):  
Nolwenn Tranvouez ◽  
Philippe Steyer ◽  
Annie Malchère ◽  
Pascal Boulet ◽  
Fabien Capon ◽  
...  

Amorphous thin films of La–Cu–O deposited by magnetron sputtering have been annealed at different temperatures and in situ analyzed by X-ray diffraction. These experiments were useful to determine the crystallization temperature and to follow the crystallization process of the film. The in situ annealing X-ray diffraction analyses have been also used to determine the thermal expansion coefficient of La2CuO4 thin film. The estimated value is close to that obtained for a commercial powder. The thermal expansion coefficient value with additional environmental scanning electron microscopy observations explains the delamination origin that occurs during the annealing before the crystallization step. The buckling and delamination of the film observed is caused by the thermal expansion coefficient mismatch of the film and the substrate. During the heating step, the mismatch generates compressive stress at the film/substrate interface, causing the film to lift off and crack in the typical way.


Coatings ◽  
2021 ◽  
Vol 11 (2) ◽  
pp. 153
Author(s):  
Chuen-Lin Tien ◽  
Tsai-Wei Lin

This paper proposes a measuring apparatus and method for simultaneous determination of the thermal expansion coefficient and biaxial Young’s modulus of indium tin oxide (ITO) thin films. ITO thin films simultaneously coated on N-BK7 and S-TIM35 glass substrates were prepared by direct current (DC) magnetron sputtering deposition. The thermo-mechanical parameters of ITO thin films were investigated experimentally. Thermal stress in sputtered ITO films was evaluated by an improved Twyman–Green interferometer associated with wavelet transform at different temperatures. When the heating temperature increased from 30 °C to 100 °C, the tensile thermal stress of ITO thin films increased. The increase in substrate temperature led to the decrease of total residual stress deposited on two glass substrates. A linear relationship between the thermal stress and substrate heating temperature was found. The thermal expansion coefficient and biaxial Young’s modulus of the films were measured by the double substrate method. The results show that the out of plane thermal expansion coefficient and biaxial Young’s modulus of the ITO film were 5.81 × 10−6 °C−1 and 475 GPa.


2016 ◽  
Vol 18 (31) ◽  
pp. 21508-21517 ◽  
Author(s):  
Xiao-Ye Zhou ◽  
Bao-Ling Huang ◽  
Tong-Yi Zhang

Surfaces of nanomaterials play an essential role in size-dependent material properties.


2014 ◽  
Vol 602-603 ◽  
pp. 628-631
Author(s):  
Xing Yong Gu ◽  
Ping Li ◽  
Wei Xia Dong ◽  
Ting Luo

Two types of mullite-Al2O3 composites were designed and sintered in situ from different composition containing Al composites e.g. kaolin, alumina hydroxide and calcined bauxite etc, and auxiliary additives. The phase composition and microstructure were studied using X-ray diffraction (XRD) and scanning electron microscope (SEM) techniques. Bulk density, apparent porosity, thermal expansion coefficient and bending strength were also measured. The two samples exhibited XRD reflections characteristic of alumina and mullite phases. The amount of these phases depended on starting batch compositions, and reaction of starting and auxiliary materials together to form mullite. Because of in-situ formation of mullite fiber, the bulk density and bending strength were improved and apparent porosity was decreased for the composites with uniform microstructure. The presence of high mullite phase was found to decrease the thermal expansion coefficient. The potential effect of these morphologies and phase on properties was discussed. These mullite-Al2O3 composite was expected to have major applications in the areas of refractory material.


2017 ◽  
Vol 726 ◽  
pp. 110-114
Author(s):  
Rui Na Pan ◽  
Chen Guang Wei ◽  
Yi Wang Bao ◽  
De Tian Wan ◽  
Yan Ping Wang

A simple test approach named relative method is developed for determining the thermal expansion coefficient of ceramic coatings. Although ceramic coatings are hardly separated from the substrates, it was evaluated in this work simply by need only the measured thermal expansion coefficient of coated samples and substrates. This novel method was demonstrated to be valid for rectangular beam samples of two types of coating configurations: sandwich coating and around coating. The feasibility of this test method was confirmed by experimental results of SiC coating.


2017 ◽  
Vol 254 (5) ◽  
pp. 1600695 ◽  
Author(s):  
I. N. Leontyev ◽  
A. A. Kulbakov ◽  
M. Allix ◽  
A. Rakhmatullin ◽  
A. B. Kuriganova ◽  
...  

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