An accurate Monte Carlo binary collision model for BF/sub 2/ implants into (100) single-crystal silicon
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1996 ◽
Vol 143
(11)
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pp. 3784-3790
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1995 ◽
pp. 214-217
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1983 ◽
Vol 41
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pp. 370-371
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1992 ◽
Vol 39
(7)
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pp. 1614-1621
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1996 ◽
Vol 9
(1)
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pp. 49-58
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