scholarly journals Reverse Leakage Current Transport mechanisms in Ni/Au Al0.58Ga0.42N Schottky type photodetectors

2021 ◽  
pp. 1-1
Author(s):  
Guofeng Yang ◽  
Yan Gu ◽  
Yushen Liu ◽  
Feng Xie ◽  
Yuhang Li ◽  
...  
2015 ◽  
Vol 38 (3) ◽  
pp. 725-729 ◽  
Author(s):  
PAN RUIKUN ◽  
LIU PANKE ◽  
LI MINGKAI ◽  
TAO HAIZHENG ◽  
LI PAI ◽  
...  

2016 ◽  
Vol 33 (11) ◽  
pp. 117301 ◽  
Author(s):  
Feng Dai ◽  
Xue-Feng Zheng ◽  
Pei-Xian Li ◽  
Xiao-Hui Hou ◽  
Ying-Zhe Wang ◽  
...  

2019 ◽  
Vol 791 ◽  
pp. 839-846 ◽  
Author(s):  
Shuan Li ◽  
Yanqing Wu ◽  
Hongen Yu ◽  
Kai Fu ◽  
Jie Zheng ◽  
...  

2021 ◽  
Vol 118 (12) ◽  
pp. 122102
Author(s):  
Qinglong Yan ◽  
Hehe Gong ◽  
Jincheng Zhang ◽  
Jiandong Ye ◽  
Hong Zhou ◽  
...  

1995 ◽  
Vol 391 ◽  
Author(s):  
W.F. Mcarthur ◽  
K.M. Ring ◽  
K.L. Kavanagh

AbstractThe feasibility of Si-implanted TiN as a diffusion barrier between Cu and Si was investigated. Barrier effectiveness was evaluated via reverse leakage current of Cu/TixSiyNz/Si diodes as a function of post-deposition annealing temperature and time, and was found to depend heavily on the film composition and microstructure. TiN implanted with Si28, l0keV, 5xl016ions/cm2 formed an amorphous ternary TixSiyNz layer whose performance as a barrier to Cu diffusion exceeded that of unimplanted, polycrystalline TiN. Results from current-voltage, transmission electron microscopy (TEM), and Auger depth profiling measurements will be presented. The relationship between Si-implantation dose, TixSiyNz structure and reverse leakage current of Cu/TixSiyNz/Si diodes will be discussed, along with implications as to the suitability of these structures in Cu metallization.


Sign in / Sign up

Export Citation Format

Share Document