A Rate-Integrating Honeycomb Disk Resonator Gyroscope With 0.038°/h Bias Instability and °7000°/s Measurement Range

2021 ◽  
Vol 42 (4) ◽  
pp. 581-584
Author(s):  
Yongmeng Zhang ◽  
Sheng Yu ◽  
Jiangkun Sun ◽  
Kuo Lu ◽  
Yi Xu ◽  
...  
Keyword(s):  
Measurement Range ◽  
Disk Resonator ◽  
Bias Instability

A Wafer-level Vacuum Packaged MEMS Disk Resonator Gyroscope with 0.42/h Bias Instability within 300/s Full Scale

2021 ◽  
pp. 1-1
Author(s):  
Hao Wang ◽  
Haiyang Quan ◽  
Jinqiu Zhou ◽  
Long Zhang ◽  
Jianbing Xie ◽  
...  
Keyword(s):  
Full Scale ◽  
Wafer Level ◽  
Disk Resonator ◽  
Bias Instability

State special primary acceleration measurement standard for gravimetry GET 190-2019

2020 ◽  
pp. 3-8
Author(s):  
L.F. Vitushkin ◽  
F.F. Karpeshin ◽  
E.P. Krivtsov ◽  
P.P. Krolitsky ◽  
V.V. Nalivaev ◽  
...  
Keyword(s):  
High Precision ◽  
Free Fall ◽  
Measurement Range ◽  
Measurement Standard ◽  
Acceleration Measurement ◽  
Measurement Systems ◽  
Free Fall Acceleration ◽  
Investigation Methods ◽  
Measurement Results ◽  
Upper Level

The State special primary acceleration measurement standard for gravimetry (GET 190-2019), its composition, principle of operation and basic metrological characteristics are presented. This standard is on the upper level of reference for free-fall acceleration measurements. Its accuracy and reliability were improved as a result of optimisation of the adjustment procedures for measurement systems and its integration within the upgraded systems, units and modern hardware components. A special attention was given to adjusting the corrections applied to measurement results with respect to procedural, physical and technical limitations. The used investigation methods made it possibled to confirm the measurement range of GET 190-2019 and to determine the contributions of main sources of errors and the total value of these errors. The measurement characteristics and GET 90-2019 were confirmed by the results obtained from measurements of the absolute value of the free fall acceleration at the gravimetrical site “Lomonosov-1” and by their collation with the data of different dates obtained from measurements by high-precision foreign and domestic gravimeters. Topicality of such measurements ensues from the requirements to handle the applied problems that need data on parameters of the Earth gravitational field, to be adequately faced. Geophysics and navigation are the main fields of application for high-precision measurements in this field.

scholarly journals Influence of the Porosity of Polymer Foams on the Performances of Capacitive Flexible Pressure Sensors

Sensors ◽  
2019 ◽  
Vol 19 (9) ◽  
pp. 1968 ◽  
Author(s):  
Sylvie Bilent ◽  
Thi Hong Nhung Dinh ◽  
Emile Martincic ◽  
Pierre-Yves Joubert
Keyword(s):  
Experimental Data ◽  
Linear Model ◽  
Dielectric Material ◽  
Pressure Sensors ◽  
Volume Ratio ◽  
Measurement Range ◽  
Polymer Foams ◽  
First Order ◽  
Non Linear ◽  
Flexible Pressure Sensors

This paper reports on the study of microporous polydimethylsiloxane (PDMS) foams as a highly deformable dielectric material used in the composition of flexible capacitive pressure sensors dedicated to wearable use. A fabrication process allowing the porosity of the foams to be adjusted was proposed and the fabricated foams were characterized. Then, elementary capacitive pressure sensors (15 × 15 mm2 square shaped electrodes) were elaborated with fabricated foams (5 mm or 10 mm thick) and were electromechanically characterized. Since the sensor responses under load are strongly non-linear, a behavioral non-linear model (first order exponential) was proposed, adjusted to the experimental data, and used to objectively estimate the sensor performances in terms of sensitivity and measurement range. The main conclusions of this study are that the porosity of the PDMS foams can be adjusted through the sugar:PDMS volume ratio and the size of sugar crystals used to fabricate the foams. Additionally, the porosity of the foams significantly modified the sensor performances. Indeed, compared to bulk PDMS sensors of the same size, the sensitivity of porous PDMS sensors could be multiplied by a factor up to 100 (the sensitivity is 0.14 %.kPa−1 for a bulk PDMS sensor and up to 13.7 %.kPa−1 for a porous PDMS sensor of the same dimensions), while the measurement range was reduced from a factor of 2 to 3 (from 594 kPa for a bulk PDMS sensor down to between 255 and 177 kPa for a PDMS foam sensor of the same dimensions, according to the porosity). This study opens the way to the design and fabrication of wearable flexible pressure sensors with adjustable performances through the control of the porosity of the fabricated PDMS foams.

scholarly journals A Resonant Pressure Microsensor with a Wide Pressure Measurement Range

Micromachines ◽  
2021 ◽  
Vol 12 (4) ◽  
pp. 382
Author(s):  
Chao Xiang ◽  
Yulan Lu ◽  
Chao Cheng ◽  
Junbo Wang ◽  
Deyong Chen ◽  
...  
Keyword(s):  
Chemical Mechanical Planarization ◽  
Measurement Range ◽  
Silicon On Insulator ◽  
Anodic Bonding ◽  
Pressure Measurements ◽  
Quality Factors ◽  
Deep Reactive Ion Etching ◽  
Wide Range ◽  
Form Pressure ◽  
Silicon Islands

This paper presents a resonant pressure microsensor with a wide range of pressure measurements. The developed microsensor is mainly composed of a silicon-on-insulator (SOI) wafer to form pressure-sensing elements, and a silicon-on-glass (SOG) cap to form vacuum encapsulation. To realize a wide range of pressure measurements, silicon islands were deployed on the device layer of the SOI wafer to enhance equivalent stiffness and structural stability of the pressure-sensitive diaphragm. Moreover, a cylindrical vacuum cavity was deployed on the SOG cap with the purpose to decrease the stresses generated during the silicon-to-glass contact during pressure measurements. The fabrication processes mainly contained photolithography, deep reactive ion etching (DRIE), chemical mechanical planarization (CMP) and anodic bonding. According to the characterization experiments, the quality factors of the resonators were higher than 15,000 with pressure sensitivities of 0.51 Hz/kPa (resonator I), −1.75 Hz/kPa (resonator II) and temperature coefficients of frequency of 1.92 Hz/°C (resonator I), 1.98 Hz/°C (resonator II). Following temperature compensation, the fitting error of the microsensor was within the range of 0.006% FS and the measurement accuracy was as high as 0.017% FS in the pressure range of 200 ~ 7000 kPa and the temperature range of −40 °C to 80 °C.

scholarly journals Frequency synchronization detection method based on adaptive frequency standard tracking

Open Physics ◽  
2021 ◽  
Vol 19 (1) ◽  
pp. 434-438
Author(s):  
Xin Geng ◽  
Baoqiang Du ◽  
Jianwei Zhang ◽  
Erlin Tian
Keyword(s):  
Detection Method ◽  
Wide Band ◽  
Frequency Standard ◽  
Frequency Measurement ◽  
Measurement Range ◽  
Period Change ◽  
Measured Signal ◽  
Frequency Synchronization ◽  
Measured Frequency ◽  
Field Programmable

Abstract In order to achieve wide-band high-resolution frequency measurement, a frequency synchronization detection method based on adaptive frequency standard tracking is proposed based on the quantized phase processing. First, the nominal value of the measured frequency signal was obtained from the rough frequency measurement module. Then, the field programmable gate array generated the nominal value of the measured frequency. After that, the direct comparison between the tracking frequency and the measured signal was carried out. Finally, the group quantized processing module gave the final result according to the phase full-period change time. Experimental results showed that the method has a wide frequency measurement range and high accuracy and can obtain frequency stability of the order of 10−13/s.

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