ICM-an analytical inversion charge model for accurate modeling of thin gate oxide MOSFETs

2002 ◽  
Author(s):  
Yuhua Cheng ◽  
Kai Chen ◽  
K. Imai ◽  
Chenming Hu
Keyword(s):  
Gate Oxide ◽  
Charge Model ◽  
Inversion Charge ◽  
Thin Gate Oxide

Low temperature operation of ultra-thin gate oxide sub-0.1 μm MOSFETs

2002 ◽  
Vol 12 (3) ◽  
pp. 57-60 ◽  
Author(s):  
B. Cretu ◽  
F. Balestra ◽  
G. Ghibaudo ◽  
G. Guégan
Keyword(s):  
Low Temperature ◽  
Gate Oxide ◽  
Thin Gate Oxide

Effect of total ionizing dose radiation on the 0.25 μm RF PDSOI nMOSFETs with thin gate oxide

2009 ◽  
Vol 30 (1) ◽  
pp. 014004 ◽  
Author(s):  
Liu Mengxin ◽  
Han Zhengsheng ◽  
Bi Jinshun ◽  
Fan Xuemei ◽  
Liu Gang ◽  
...  
Keyword(s):  
Gate Oxide ◽  
Total Ionizing Dose ◽  
Thin Gate Oxide ◽  
Dose Radiation

Highly Stable Ir-Ta-O Electrode for Ferroelectric Material Deposition

2000 ◽  
Vol 655 ◽  
Author(s):  
Fengyan Zhang ◽  
Sheng Teng Hsu ◽  
Jer-shen Maa ◽  
Yoshi Ono ◽  
Ying Hong ◽  
...  
Keyword(s):  
High Temperature ◽  
Bottom Electrode ◽  
Temperature Stability ◽  
Gate Oxide ◽  
Ferroelectric Material ◽  
High Temperature Stability ◽  
Material Deposition ◽  
Long Time ◽  
The Stability ◽  
Thin Gate Oxide

AbstractIr-Ta-O composite bottom electrode has extraordinary high temperature stability. It can maintain good conductivity and integrity even after 5min annealing at 1000 °C in oxygen ambient. The thermal stability of Ir-Ta-O on different substrates has been studied. It shows that Ir-Ta-O is also very stable on Si and SiO2 substrates. No hillock formation and peelings of the bottom electrode were observed after high temperature and long time annealing in O2 ambient. SEM, TEM, XRD, and AES have been used to characterize the Ir-Ta-O film and the interfaces between Ir-Ta-O bottom electrode and Si or SiO2 substrate. The composition and conductivity changes of the electrode during oxygen ambient annealing and the interdiffusion issue will be discussed. Furthermore, Ir-Ta-O/SiO2/Si capacitor with 30Å gate oxide was fabricated and the C-V and I-V characteristics were measured to confirm the stability of Ir-Ta-O on thin gate oxide.

scholarly journals Hot-carrier-induced degradation of drain current hysteresis and transients in thin gate oxide floating body partially depleted SOI nMOSFETs

2006 ◽  
Vol 46 (9-11) ◽  
pp. 1657-1663 ◽  
Author(s):  
J.M. Rafí ◽  
E. Simoen ◽  
K. Hayama ◽  
A. Mercha ◽  
F. Campabadal ◽  
...  
Keyword(s):  
Drain Current ◽  
Gate Oxide ◽  
Floating Body ◽  
Hot Carrier ◽  
Thin Gate Oxide

scholarly journals The dynamic reliability of ultra-thin gate oxide and its breakdown characteristics

2008 ◽  
Vol 57 (4) ◽  
pp. 2524
Author(s):  
Luan Su-Zhen ◽  
Liu Hong-Xia ◽  
Jia Ren-Xu
Keyword(s):  
Gate Oxide ◽  
Dynamic Reliability ◽  
Thin Gate Oxide
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