Casimir and Van Der Waals Effects on Parametric Resonance of Bio-NEMS Circular Plate Resonators

Sensing Applications ◽

Fixed Electrode ◽

Electrode Plate

This paper deals with Casimir and van der Waals effects on the frequency response of parametric resonance of electrostatically actuated NEMS circular plates for bio-sensing applications. The bio-NEMS resonator consists of a clamped circular elastic plate over a fixed electrode plate. A soft AC voltage of frequency near natural frequency between the plates gives an electrostatic force that leads the elastic plate into vibration which leads to parametric resonance that can be used afterwards for biosensing purposes. Frequency response and the effects of Casimir, and van der Waals forces on the response are reported.

Parametric Resonance of MEMS Circular Plate Resonators

Volume 8: 27th Conference on Mechanical Vibration and Noise ◽

10.1115/detc2015-46584 ◽

2015 ◽

Author(s):

Dumitru I. Caruntu ◽

Reynaldo Oyervides

Keyword(s):

Frequency Response ◽

Natural Frequency ◽

Circular Plate ◽

Parametric Resonance ◽

Elastic Plate ◽

Electrostatic Force ◽

Circular Plates ◽

Sensing Applications ◽

This paper investigates parametric resonance of electrostatically actuated MEMS circular plates for resonator sensing applications. The system consists of a clamped circular elastic plate over a ground plate. Soft AC voltage of frequency near natural frequency of the plate gives the electrostatic force that leads the elastic plate into vibration, more specifically into parametric resonance which can be used afterwards for biosensing purposes. Frequency response and corresponding bifurcations are reported. The effects of damping and voltage are predicted.

Frequency Response of Parametric Resonance of Electrostatically Actuated Circular Plates Under Hard Excitations

Volume 8: 31st Conference on Mechanical Vibration and Noise ◽

10.1115/detc2019-98104 ◽

2019 ◽

Author(s):

Julio Beatriz ◽

Dumitru I. Caruntu

Keyword(s):

Frequency Response ◽

Parametric Resonance ◽

Multiple Scales ◽

Reduced Order Model ◽

Circular Plates ◽

Order Model ◽

Reduced Order ◽

Modes Of Vibration

Abstract In this paper, the Method of Multiple Scales, and the Reduced Order Model method of two modes of vibration are used to investigate the amplitude-frequency response of parametric resonance of electrostatically actuated circular plates under hard excitations. Results show that the Method of Multiple Scales is accurate for low voltages. However, it starts to separate from the Reduced Order Model results as the voltage values are larger. The Method of Multiple Scales is good for low amplitudes and weak non-linearities. Furthermore the Reduced Order Model running with AUTO 07p is validated and calibrated using the 2 Term ROM time responses.

Volume 2: Diagnostics and Detection; Drilling; Dynamics and Control of Wind Energy Systems; Energy Harvesting; Estimation and Identification; Flexible and Smart Structure Control; Fuels Cells/Energy Storage; Human Robot Interaction; HVAC Building Energy Management; Industrial Applications; Intelligent Transportation Systems; Manufacturing; Mechatronics; Modelling and Validation; Motion and Vibration Control Applications ◽

Casimir and Van der Waals Effects on Voltage Response of Electrostatically Actuated MEMS/NEMS Plates

10.1115/dscc2015-9775 ◽

2015 ◽

Author(s):

Dumitru I. Caruntu ◽

Reynaldo Oyervides ◽

Valeria Garcia

Keyword(s):

Natural Frequency ◽

Parametric Resonance ◽

Electrostatic Force ◽

Van Der Waals ◽

Van Der Waals Forces ◽

Voltage Response ◽

Voltage Amplitude ◽

Amplitude Response ◽

This paper deals with electrostatically actuated MEMS plates. The model consists of a flexible MEMS plate above a parallel ground plate. An AC voltage of frequency near natural frequency of the plate provides the electrostatic force that actuates the flexible MEMS plate. This leads to parametric resonance. The effect of Casimir and/or van der Waals forces on the voltage-amplitude response of the plate is investigated.

Volume 2: Modeling and Control of Engine and Aftertreatment Systems; Modeling and Control of IC Engines and Aftertreatment Systems; Modeling and Validation; Motion Planning and Tracking Control; Multi-Agent and Networked Systems; Renewable and Smart Energy Systems; Thermal Energy Systems; Uncertain Systems and Robustness; Unmanned Ground and Aerial Vehicles; Vehicle Dynamics and Stability; Vibrations: Modeling, Analysis, and Control ◽

Comparison of Frequency Response of Parametric Resonance of DWCNT and SWCNT Under Electrostatic Actuation

10.1115/dscc2019-9171 ◽

2019 ◽

Author(s):

Dumitru I. Caruntu ◽

Ezequiel Juarez

Keyword(s):

Carbon Nanotubes ◽

Frequency Response ◽

Parametric Resonance ◽

Multiple Scales ◽

Van Der Waals ◽

Van Der Waals Force ◽

Beam Model ◽

Weakly Nonlinear ◽

Walled Carbon Nanotubes

Abstract This paper deals with electrostatically actuated Double-Walled Carbon Nanotubes (DWCNT) and Single-Walled Carbon Nanotubes (SWCNT) cantilever resonators. Frequency response of parametric resonance is investigated. Euler-Bernoulli cantilever beam model is used for both DWCNT and SWCNT. Electrostatic and viscous damping forces are applied on both types of resonators, DWCNT and SWCNT. In this investigation, soft AC voltage excitation is assumed. For the DWCNT, an intertube van der Waals force is present between the two concentric carbon nanotubes (CNTs), coupling their motion and acting as a nonlinear spring. The nonlinearities in the vibration are provided by the electrostatic (both SWCNT and DWCNT) and intertube van der Waals forces (DWCNT). The Method of Multiple Scales (MMS) is a perturbation method that provides uniformly valid approximations for weakly nonlinear systems. A Reduced-Order-Model (ROM) is developed and numerically solved using AUTO-07P (bifurcation and continuation software). Since large tip deflections are investigated in this paper, only coaxial vibration of the DWCNT is considered. Parametric resonance is investigated, as well as the influences of damping and voltage. Lastly, the effect of intertube van der Waals force on the bifurcation and stability of the DWCNT is reported.

Voltage Response of Parametric Resonance of MEMS Circular Plates Under Hard Excitations

10.1115/dscc2019-9059 ◽

2019 ◽

Author(s):

Julio S. Beatriz ◽

Dumitru I. Caruntu

Keyword(s):

Parametric Resonance ◽

Multiple Scales ◽

Electrostatic Force ◽

Voltage Response ◽

Circular Plates ◽

Order Model ◽

Reduced Order ◽

Modes Of Vibration

Abstract This work deals with the voltage response of parametric resonance of electrostatically actuated microelectromechanical (MEMS) circular plates under hard excitations. Method of Multiple Scales (MMS) and Reduced Order Model (ROM) method using two modes of vibration are used to predict the voltage-amplitude response of the MEMS circular plates. ROM is solved using AUTO 07p, a software package for continuation and bifurcation. MMS used in this paper has one term in the electrostatic force being considered significant. This is the way MMS is used to model hard excitations. MMS shows results similar to those of ROM at lower amplitudes and lower voltages. The differences between the two methods, MMS and ROM, are significant in high amplitudes for all voltages, and the differences are significant in all amplitudes for larger voltages. Significant differences can be noted in the effect of different parameters such as the detuning frequency and damping on the voltage response. ROM AUTO 07p is calibrated using ROM time responses in which the ROM is solved using the solver ode15s in Matlab.

Voltage effect on amplitude–frequency response of parametric resonance of electrostatically actuated double-walled carbon nanotube resonators

Nonlinear Dynamics ◽

10.1007/s11071-019-05057-8 ◽

2019 ◽

Vol 98 (4) ◽

pp. 3095-3112 ◽

Cited By ~ 1

Author(s):

Dumitru I. Caruntu ◽

Ezequiel Juarez

Keyword(s):

Carbon Nanotube ◽

Frequency Response ◽

Parametric Resonance ◽

Amplitude Frequency Response

Amplitude-Frequency Response for Superharmonic Resonance of Fourth Order of Electrostatically Actuated MEMS Cantilever Resonators

Volume 4: Dynamics, Vibration, and Control ◽

10.1115/imece2019-11198 ◽

2019 ◽

Author(s):

Dumitru I. Caruntu ◽

Christopher Reyes

Keyword(s):

Frequency Response ◽

Fourth Order ◽

Microelectromechanical Systems ◽

Multiple Scales ◽

Electrostatic Force ◽

Damping Force ◽

Superharmonic Resonance ◽

Homotopy Analysis ◽

Abstract This paper deals with the frequency response of superharmonic resonance of order four of electrostatically actuated MicroElectroMechanical Systems (MEMS) cantilever resonators. The MEMS structure in this work consists of a microcantilever parallel to an electrode ground plate. The MEMS resonator is elelctrostatically actuated through an AC voltage between the cantilever and the ground plate. The voltage is in the category of hard excitation. The AC frequency is near one eight of the natural frequency of the resonator. Since the electrostatic force acting on the resonator is proportional to the square of the voltage, it leads to superharmonic resonance of fourth order. Besides the electrostatic force, the system experiences damping. The damping force in this work is proportional to the velocity of the resonator, i.e. it is linear damping. Three methods are employed in this investigation. First, the Method of Multiple Scales (MMS), a perturbation method, is used predictions of the resonant regions for weak nonlinearities and small to moderate amplitudes. Second, the Homotopy Analysis Method (HAM), and third, the Reduced Order Model (ROM) method using two modes of vibration are also utilized to investigate the resonance. ROM is solved through numerical integration using Matlab in order to simulate time responses of the structure. All methods are in agreement for moderate nonlinearities and small to moderate amplitudes. This work shows that adequate MMS and HAM provide good predictions of the resonance.

Volume 3: Vibration in Mechanical Systems; Modeling and Validation; Dynamic Systems and Control Education; Vibrations and Control of Systems; Modeling and Estimation for Vehicle Safety and Integrity; Modeling and Control of IC Engines and Aftertreatment Systems; Unmanned Aerial Vehicles (UAVs) and Their Applications; Dynamics and Control of Renewable Energy Systems; Energy Harvesting; Control of Smart Buildings and Microgrids; Energy Systems ◽

Parametric Resonance of Electrostatically Actuated MEMS Cantilever Resonators Using Method of Multiple Scales and Homotopy Perturbation Method

10.1115/dscc2017-5124 ◽

2017 ◽

Author(s):

Christopher Reyes ◽

Dumitru I. Caruntu

Keyword(s):

Perturbation Method ◽

Parametric Resonance ◽

Homotopy Perturbation Method ◽

Multiple Scales ◽

Electrostatic Force ◽

Plate Electrode ◽

Homotopy Perturbation ◽

This paper investigates the dynamics governing the behavior of electrostatically actuated MEMS cantilever resonators. The cantilever is held parallel to a ground plate (electrode) with an AC voltage between the plate and the electrode causing the electrostatic actuation (excitation). For the purposes of this paper this is soft excitation. The frequency of the excitation is near the natural frequency of the cantilever leading to what is known as parametric resonance. The electrostatic force in the problem investigated throughout the paper is nonlinear in nature and includes the fringe effect. Two methods are used in investigating this problem: the method of multiple scales (MMS) and the homotopy perturbation method (HPM). The two methods work well for small non-linearities and small amplitudes. The influence of voltage, fringe, damping, Casimir, and Van der Waals parameters will be investigated in this paper using MMS and HPM as a means of verifying the results obtained.

Volume 7: 5th International Conference on Micro- and Nanosystems; 8th International Conference on Design and Design Education; 21st Reliability, Stress Analysis, and Failure Prevention Conference ◽

On Electrostatically Actuated CNT Bio-Sensors

10.1115/detc2011-48379 ◽

2011 ◽

Author(s):

Dumitru I. Caruntu ◽

Cone S. Salinas Trevino

Keyword(s):

Carbon Nanotubes ◽

Multiple Scales ◽

Van Der Waals ◽

Primary Resonance ◽

Mass Detection ◽

Sensing Applications ◽

Ground Plate ◽

Frequency Phase

This paper deals with electrostatically actuated Carbon NanoTubes (CNT) cantilevers for bio-sensing applications. There are three kinds of forces acting on the CNT cantilever: electrostatic, elastostatic, and van der Waals. The van der Waals forces are significant for values of 50 nm or lower of the gap between the CNT and the ground plate. As both forces electrostatic and van der Waals are nonlinear, and the CNT electrostatic actuation is given by AC voltage, the CNT dynamics is nonlinear parametric. The method of multiple scales is used to investigate the system under soft excitations and/or weakly nonlinearities. The frequency-amplitude and frequency-phase behavior are found in the case of primary resonance. The CNT bio-sensor is to be used for mass detection applications.

Volume 1: Advances in Control Design Methods, Nonlinear and Optimal Control, Robotics, and Wind Energy Systems; Aerospace Applications; Assistive and Rehabilitation Robotics; Assistive Robotics; Battery and Oil and Gas Systems; Bioengineering Applications; Biomedical and Neural Systems Modeling, Diagnostics and Healthcare; Control and Monitoring of Vibratory Systems; Diagnostics and Detection; Energy Harvesting; Estimation and Identification; Fuel Cells/Energy Storage; Intelligent Transportation ◽

Reduced Order Model on DC Bias Effect on the Frequency Response of Electrostatically Actuated Biosensor Microplates

10.1115/dscc2016-9714 ◽

2016 ◽

Author(s):

Dumitru I. Caruntu ◽

Christian Reyes

Keyword(s):

Frequency Response ◽

Electrostatic Force ◽

Alternate Current ◽

Reduced Order Model ◽

Order Model ◽

Bias Effect ◽

Reduced Order ◽

Ground Plate ◽

Dc Bias

This paper investigates the frequency response of microplates under electrostatic actuation. The microplate is parallel to a fixed ground plate. The electrostatic force that actuates the system is given by both Alternate Current (AC) and Direct Current (DC) voltages. The AC frequency is set to be near half natural frequency of the structure. Damping influence is also investigated in this paper. The method of investigation is Reduced Order Model. The effects of various parameters on the response of the structure are reported.