In-Situ Frequency Tuning of Electrostatically Actuated Vibrating Nano Structures Using Focused Ion Beam

2006 ◽  
Author(s):  
Jiyoung Chang ◽  
Jongbaeg Kim ◽  
Byung-Kwon Min ◽  
Sang Jo Lee ◽  
Liwei Lin
Keyword(s):  
Resonant Frequency ◽  
Focused Ion Beam ◽  
Frequency Tuning ◽  
Electrostatic Force ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Fem Analysis ◽  
Experimental Result ◽  
Nano Structures

Schemes for in-situ resonant frequency tuning of nano scale vibrating structures using Focused Ion Beam (FIB) sputtering and FIB-Chemical Vapor Deposition (CVD) are presented. This approach introduces precisely controlled permanent increase or decrease of resonant frequencies on processed nano structures, enabling the frequency adjustment when the desired resonant frequency is higher or lower than the actual frequency of the fabricated resonators. The vibration is induced by electrostatic force between resonator and stator using 0~10V AC input and all the processes including fabrication of nanostructure, electrostatic actuation, vibration observation and frequency tuning in either higher or lower direction were successfully conducted in single FIB chamber. The range of the frequency tuned from 600kHz initial resonant frequency is +6kHz with -1.9μm and -65kHz with +1.1μm length change of the nano-resonator respectively. Structural FEM analysis result is compared with the experimental result.

Using an In-Situ Micromirror to Assist the Measurement of In-Plane Vibration of Microstructures

2010 ◽  
Author(s):  
Jacky Chow ◽  
Yong-Jun Lai
Keyword(s):  
Wave Vector ◽  
Focused Ion Beam ◽  
Electrostatic Force ◽  
Ion Beam ◽  
Laser Interferometry ◽  
Slant Angle ◽  
Out Of Plane ◽  
Measurement Laser ◽  
Micro Cantilever

Heterodyne laser interferometry is an optical technique often used to measure displacement of surfaces along the wave vector direction of a measurement laser. For common microelectromechanical system (MEMS) testing setup, such laser wave vector is perpendicular to the substrate which the micromachined devices stand on. Therefore, this technique can only be used to characterize dynamics of the micro devices in the direction perpendicular to their substrate (out-of-plane motions) with the classic setup and it is not able to measure any motion that is parallel to the substrate (in-plane motions). In this study, in-situ micromirrors are fabricated onto a microstructure that is near the device to be measured by using a focused ion beam system. The micromirrors have a slant angle of approximate 45 degree to horizontal surface (or their substrate). By using the post-fabricated in-situ micromirror, the measurement laser of a heterodyne interferometer can be directed into horizontal plane which enables characterization of in-plane motions for micromechanical. To experimentally demonstrate the technique a micro cantilever fabricated using MetalMUMPs is used. The micro cantilever is excited by inplane electrostatic force. The results confirm the effectiveness of the method by the fact that the magnitude of the measured in-plane signal is increased by more than ten folds.

In-Situ Characterization of Nano-Structures Fabricated by Focused Ion Beam (FIB) and Nano Particle Deposition System (NPDS)

2014 ◽  
Author(s):  
Hyun-Taek Lee ◽  
Chung-Soo Kim ◽  
Hae-Sung Yoon ◽  
Ki-Hwan Jang ◽  
Jung-Oh Choi ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Mechanical Property ◽  
Particle Deposition ◽  
Focused Ion Beam ◽  
Bulk Material ◽  
Ion Beam ◽  
Test Method ◽  
Nano Particle ◽  
Nano Structures

Nano particle deposition system (NPDS) had been developed for the creation of micro/nano structures with multimaterials in order to develop the micro/nano devices on the basis of specific localized surface on the multilayer. However, micro structures fabricated by NPDS show different mechanical properties when it compared to bulk material because of its porous and uneven deposition structure. To achieve reasonable mechanical properties of the structure fabricated by nanoscale 3D printing system, it requires in-situ mechanical property test method. Herein, a new approach for in-situ nanomechanical characterization system using microforce sensor and nanomanipulator installed in focused ion beam system. In this research, experimental setup for mechanical characterization was developed and mechanical property test was done in Focused Ion Beam (FIB) system. The specimen was fabricated by FIB milling process, then manipulation and compression processes are operated by this characterization system with real time imaging. The test was done for silver microstructures fabricated by NPDS and results show weaker hardness and smaller young’s modulus than bulk material.

Transmission Electron Microscopy (TEM) Specimen Preparation Technique using Focused Ion Beam (FIB): Application to Material Characterization of Chemical Vapor Deposition of Tungsten (W) and Tungsten Silicides (WSix)

1997 ◽  
Author(s):  
K. Doong ◽  
J.-M. Fu ◽  
Y.-C. Huang
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Specimen Preparation ◽  
Preparation Technique ◽  
Transmission Electron

Abstract The specimen preparation technique using focused ion beam (FIB) to generate cross-sectional transmission electron microscopy (XTEM) samples of chemical vapor deposition (CVD) of Tungsten-plug (W-plug) and Tungsten Silicides (WSix) was studied. Using the combination method including two axes tilting[l], gas enhanced focused ion beam milling[2] and sacrificial metal coating on both sides of electron transmission membrane[3], it was possible to prepare a sample with minimal thickness (less than 1000 A) to get high spatial resolution in TEM observation. Based on this novel thinning technique, some applications such as XTEM observation of W-plug with different aspect ratio (I - 6), and the grain structure of CVD W-plug and CVD WSix were done. Also the problems and artifacts of XTEM sample preparation of high Z-factor material such as CVD W-plug and CVD WSix were given and the ways to avoid or minimize them were suggested.

To Eliminate Curtain Effect of FIB TEM Samples by a Combination of Sample Dicing and Backside Milling

2014 ◽  
Author(s):  
Jian-Shing Luo ◽  
Hsiu Ting Lee
Keyword(s):  
Sample Preparation ◽  
Focused Ion Beam ◽  
Preparation Method ◽  
Low Cost ◽  
Ion Beam ◽  
Sample Preparation Method ◽  
Site Specific ◽  
Dual Beam ◽  
Transmission Electron

Abstract Several methods are used to invert samples 180 deg in a dual beam focused ion beam (FIB) system for backside milling by a specific in-situ lift out system or stages. However, most of those methods occupied too much time on FIB systems or requires a specific in-situ lift out system. This paper provides a novel transmission electron microscopy (TEM) sample preparation method to eliminate the curtain effect completely by a combination of backside milling and sample dicing with low cost and less FIB time. The procedures of the TEM pre-thinned sample preparation method using a combination of sample dicing and backside milling are described step by step. From the analysis results, the method has applied successfully to eliminate the curtain effect of dual beam FIB TEM samples for both random and site specific addresses.

Investigations of Leakage Paths in Sub-0.35μm DRAM Products Using Advanced Focused Ion Beam Techniques

1998 ◽  
Author(s):  
H. Lorenz ◽  
C. Engel
Keyword(s):  
Focused Ion Beam ◽  
Cell Function ◽  
Dielectric Breakdown ◽  
Ion Beam ◽  
Electrical Characterization ◽  
Floating Gate ◽  
Leakage Path ◽  
Contrast Technique ◽  
Voltage Contrast

Abstract Due to the continuously decreasing cell size of DRAMs and concomitantly diminishing thickness of some insulating layers new failure mechanisms appear which until now had no significance for the cell function. For example high resistance leakage paths between closely spaced conductors can lead to retention problems. These are hard to detect by electrical characterization in a memory tester because the involved currents are in the range of pA. To analyze these failures we exploit the very sensitive passive voltage contrast of the Focused Ion Beam Microscope (FIB). The voltage contrast can further be enhanced by in-situ FIB preparations to obtain detailed information about the failure mechanism. The first part of this paper describes a method to detect a leakage path between a borderless contact on n-diffusion and an adjacent floating gate by passive voltage contrast achieved after FIB circuit modification. In the second part we will demonstrate the localization of a DRAM trench dielectric breakdown. In this case the FIB passive voltage contrast technique is not limited to the localization of the failing trench. We can also obtain the depth of the leakage path by selective insitu etching with XeF2 stopped immediately after a voltage contrast change.

A method to improve the quality of 2.5 dimensional micro-and nano-structures produced by focused ion beam machining

Micron ◽  
2017 ◽  
Vol 101 ◽  
pp. 8-15 ◽  
Author(s):  
Daniele De Felicis ◽  
Muhammad Zeeshan Mughal ◽  
Edoardo Bemporad
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Nano Structures

scholarly journals Cyclic Deformation of Microcantilevers Using In-Situ Micromanipulation

2021 ◽  
Author(s):  
A. H. S. Iyer ◽  
M. H. Colliander
Keyword(s):  
Degrees Of Freedom ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Structural Components ◽  
Cyclic Testing ◽  
Phase Boundaries ◽  
Bulk Specimen ◽  
Arbitrary Position ◽  
Three Degrees Of Freedom

Abstract Background The trend in miniaturisation of structural components and continuous development of more advanced crystal plasticity models point towards the need for understanding cyclic properties of engineering materials at the microscale. Though the technology of focused ion beam milling enables the preparation of micron-sized samples for mechanical testing using nanoindenters, much of the focus has been on monotonic testing since the limited 1D motion of nanoindenters imposes restrictions on both sample preparation and cyclic testing. Objective/Methods In this work, we present an approach for cyclic microcantilever bending using a micromanipulator setup having three degrees of freedom, thereby offering more flexibility. Results The method has been demonstrated and validated by cyclic bending of Alloy 718plus microcantilevers prepared on a bulk specimen. The experiments reveal that this method is reliable and produces results that are comparable to a nanoindenter setup. Conclusions Due to the flexibility of the method, it offers straightforward testing of cantilevers manufactured at arbitrary position on bulk samples with fully reversed plastic deformation. Specific microstructural features, e.g., selected orientations, grain boundaries, phase boundaries etc., can therefore be easily targeted.

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