Fabrication of a Micro/Nano Integrated Roughened Structure Using Nanosphere Lithography (NSL)
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This paper presents a fabrication technology to create a double roughened PDMS structure for a superhydrophobic surface. The fabricated surface has many application potentials, including on-chip micro liquid processor and water repellent coating. Similar structure can be found in nature on a lotus leaf (Fig. 1.) Due to its superhydrophobic surface, lotus leaf repels water and in the process performs self-cleaning [1]. In this paper, we show the combination of Nanosphere Lithography (NSL), plasma etching, and molding technique to create the micro/nano integrated double structure using PDMS. Also described is the design procedure and experimental results for the double-structured superhydrophobic surface.
2014 ◽
Vol 633-634
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pp. 764-768
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Vol 474-476
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pp. 413-416
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2009 ◽
Vol 8
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pp. 043004
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2019 ◽
Vol 89
(19-20)
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pp. 4220-4229
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