Silicon Carbide MEMS Capacitive Pressure Sensor for Harsh Environments

2013 ◽  
Author(s):  
Zhibang Chen ◽  
Wei Du ◽  
Feng Zhao
Keyword(s):  
Silicon Carbide ◽  
Pressure Sensor ◽  
Large Scale ◽  
Applied Pressure ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Wide Range ◽  
Sensor Structure ◽  
Nuclear Station ◽  
Oil Gas

In this paper, we investigated a new capacitive pressure sensor structure on a silicon carbide (SiC) platform for high sensitivity and harsh environment operation capability. The superior material properties of SiC ensure robustness of the new sensor to withstand large-scale pressure at high temperature and in chemical/biological medium. The sensor structure consists of a circular SiC diaphragm suspended by four arms over a SiC substrate, with design to enable diaphragm to deflect nearly uniformly with applied pressure. This configuration results in improved sensing properties. With high sensitivity and operation capability in hostile environment, this new pressure sensor is promising for use in a wide range of applications such as automotive, nuclear station, aerospace, and oil/gas exploration, etc.

Development of circuit solution and design of capacitive pressure sensor array for applied robotics

2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
Sensor Array ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Fine Tuning ◽  
Capacitive Pressure Sensor ◽  
Cell Parameters ◽  
Linear Pattern ◽  
Sensor Structure

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

Capacitive Pressure Sensor with Wide-Range, Bendable, and High Sensitivity Based on the Bionic Komochi Konbu Structure and Cu/Ni Nanofiber Network

2019 ◽  
Vol 11 (12) ◽  
pp. 11928-11935 ◽  
Author(s):  
Jian Wang ◽  
Ryuki Suzuki ◽  
Marine Shao ◽  
Frédéric Gillot ◽  
Seimei Shiratori
Keyword(s):  
Pressure Sensor ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Wide Range

scholarly journals High-Sensitivity Flexible Pressure Sensor-Based 3D CNTs Sponge for Human–Computer Interaction

Polymers ◽  
2021 ◽  
Vol 13 (20) ◽  
pp. 3465
Author(s):  
Jianli Cui ◽  
Xueli Nan ◽  
Guirong Shao ◽  
Huixia Sun
Keyword(s):  
Pressure Sensor ◽  
High Performance ◽  
Large Scale ◽  
Low Cost ◽  
Pressure Sensors ◽  
Chemical Vapor ◽  
High Sensitivity ◽  
Wearable Electronics ◽  
Wide Range ◽  
Flexible Pressure Sensors

Researchers are showing an increasing interest in high-performance flexible pressure sensors owing to their potential uses in wearable electronics, bionic skin, and human–machine interactions, etc. However, the vast majority of these flexible pressure sensors require extensive nano-architectural design, which both complicates their manufacturing and is time-consuming. Thus, a low-cost technology which can be applied on a large scale is highly desirable for the manufacture of flexible pressure-sensitive materials that have a high sensitivity over a wide range of pressures. This work is based on the use of a three-dimensional elastic porous carbon nanotubes (CNTs) sponge as the conductive layer to fabricate a novel flexible piezoresistive sensor. The synthesis of a CNTs sponge was achieved by chemical vapor deposition, the basic underlying principle governing the sensing behavior of the CNTs sponge-based pressure sensor and was illustrated by employing in situ scanning electron microscopy. The CNTs sponge-based sensor has a quick response time of ~105 ms, a high sensitivity extending across a broad pressure range (less than 10 kPa for 809 kPa−1) and possesses an outstanding permanence over 4,000 cycles. Furthermore, a 16-pixel wireless sensor system was designed and a series of applications have been demonstrated. Its potential applications in the visualizing pressure distribution and an example of human–machine communication were also demonstrated.

scholarly journals Novel Design and Fabrication of High Sensitivity MEMS Capacitive Sensor Array for Fingerprint Imaging

2009 ◽  
Vol 74 ◽  
pp. 239-242 ◽  
Author(s):  
Mitra Damghanian ◽  
Burhanuddin Yeop Majlis
Keyword(s):  
Pressure Sensor ◽  
Sensor Array ◽  
Fem Analysis ◽  
High Sensitivity ◽  
Capacitive Sensor ◽  
Capacitive Pressure Sensor ◽  
Structural Modifications ◽  
Enhanced Sensitivity ◽  
Sensor Structure ◽  
Novel Design

A novel MEMS capacitive pressure sensor array is designed and fabricated for fingerprint acquisition application. Based on analytical investigations and FEM analysis, the designed structure of pressure sensor cells assist from an aluminum clamped-clamped wide beam as the movable electrode of variant capacitor, instead of usual membrane structure. A rectangular base T-shape protrusion is also used on top of the deflecting electrode to concentrate pressure and increase the sensitivity. Proven by the real test of the fabricated sensor structure, this design has enhanced sensitivity and linearity of the device compared to all membrane based reported prototypes without crossing the dpi limits. Structural modifications have resulted in a simpler fabrication process as well.

scholarly journals Flexible Wireless Passive LC Pressure Sensor with Design Methodology and Cost-Effective Preparation

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 976
Author(s):  
Zhuqi Sun ◽  
Haoyu Fang ◽  
Baochun Xu ◽  
Lina Yang ◽  
Haoran Niu ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Electronic Device ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Intimate Contact ◽  
Physical Motion ◽  
Readout Device ◽  
Wearable Electronic Device

Continuous monitoring of physical motion, which can be successfully achieved via a wireless flexible wearable electronic device, is essential for people to ensure the appropriate level of exercise. Currently, most of the flexible LC pressure sensors have low sensitivity because of the high Young’s modulus of the dielectric properties (such as PDMS) and the inflexible polymer films (as the substrate of the sensors), which don’t have excellent stretchability to conform to arbitrarily curved and moving surfaces such as joints. In the LC sensing system, the metal rings, as the traditional readout device, are difficult to meet the needs of the portable readout device for the integrated and planar readout antenna. In order to improve the pressure sensitivity of the sensor, the Ecoflex microcolumn used as the dielectric of the capacitive pressure sensor was prepared by using a metal mold copying method. The Ecoflex elastomer substrates enhanced the levels of conformability, which offered improved capabilities to establish intimate contact with the curved and moving surfaces of the skin. The pressure was applied to the sensor by weights, and the resonance frequency curves of the sensor under different pressures were obtained by the readout device connected to the vector network analyzer. The experimental results show that resonant frequency decreases linearly with the increase of applied pressure in a range of 0–23,760 Pa with a high sensitivity of −2.2 MHz/KPa. We designed a coplanar waveguide-fed monopole antenna used to read the information of the LC sensor, which has the potential to be integrated with RF signal processing circuits as a portable readout device and a higher vertical readout distance (up to 4 cm) than the copper ring. The flexible LC pressure sensor can be attached to the skin conformally and is sensitive to limb bending and facial muscle movements. Therefore, it has the potential to be integrated as a body sensor network that can be used to monitor physical motion.

Flexible M-Tooth Hybrid Micro-Structure Based Capacitive Pressure Sensor with High Sensitivity and Wide Sensing Range

2021 ◽  
pp. 1-1
Author(s):  
Valliammai Palaniappan ◽  
Masoud Panahi ◽  
Dinesh Maddipatla ◽  
Xingzhe Zhang ◽  
Simin Masihi ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Micro Structure ◽  
Sensing Range

Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene

2021 ◽  
Author(s):  
Jiang Zhao ◽  
Jiahao Gui ◽  
Jinsong Luo ◽  
Jing Gao ◽  
Caidong Zheng ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Screen Printing ◽  
Large Scale ◽  
Low Cost ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Wearable Electronics ◽  
Integrated Sensor ◽  
Patterned Electrodes ◽  
Screen Printed

Abstract Graphene-based pressure sensors have received extensive attention in wearable devices. However, reliable, low-cost, and large-scale preparation of structurally stable graphene electrodes for flexible pressure sensors is still a challenge. Herein, for the first time, laser-induced graphene (LIG) powder are prepared into screen printing ink, and shape-controllable LIG patterned electrodes can be obtained on various substrates using a facile screen printing process, and a novel asymmetric pressure sensor composed of the resulting screen-printed LIG electrodes has been developed. Benefit from the 3D porous structure of LIG, the as-prepared flexible LIG screen-printed asymmetric pressure sensor has super sensing properties with a high sensitivity of 1.86 kPa−1, low detection limit of about 3.4 Pa, short response time, and long cycle durability. Such excellent sensing performances give our flexible asymmetric LIG screen-printed pressure sensor the ability to realize real-time detection of tiny body physiological movements (such as wrist pulse and pronunciation action). Besides, the integrated sensor array has a multi-touch function. This work could stimulate an appropriate approach to designing shape-controllable LIG screen-printed patterned electrodes on various flexible substrates to adapt the specific needs of fulfilling compatibility and modular integration for potential application prospects in wearable electronics.

scholarly journals Nano Carbon Black-Based High Performance Wearable Pressure Sensors

Nanomaterials ◽  
2020 ◽  
Vol 10 (4) ◽  
pp. 664 ◽  
Author(s):  
Junsong Hu ◽  
Junsheng Yu ◽  
Ying Li ◽  
Xiaoqing Liao ◽  
Xingwu Yan ◽  
...  
Keyword(s):  
Carbon Black ◽  
Pressure Sensor ◽  
High Performance ◽  
Large Scale ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Wearable Electronics ◽  
Atmospheric Pollutant ◽  
Piezoresistive Pressure Sensor ◽  
Nano Carbon

The reasonable design pattern of flexible pressure sensors with excellent performance and prominent features including high sensitivity and a relatively wide workable linear range has attracted significant attention owing to their potential application in the advanced wearable electronics and artificial intelligence fields. Herein, nano carbon black from kerosene soot, an atmospheric pollutant generated during the insufficient burning of hydrocarbon fuels, was utilized as the conductive material with a bottom interdigitated textile electrode screen printed using silver paste to construct a piezoresistive pressure sensor with prominent performance. Owing to the distinct loose porous structure, the lumpy surface roughness of the fabric electrodes, and the softness of polydimethylsiloxane, the piezoresistive pressure sensor exhibited superior detection performance, including high sensitivity (31.63 kPa−1 within the range of 0–2 kPa), a relatively large feasible range (0–15 kPa), a low detection limit (2.26 pa), and a rapid response time (15 ms). Thus, these sensors act as outstanding candidates for detecting the human physiological signal and large-scale limb movement, showing their broad range of application prospects in the advanced wearable electronics field.

scholarly journals Locally Controlled Sensing Properties of Stretchable Pressure Sensors Enabled by Micro-Patterned Piezoresistive Device Architecture

Sensors ◽  
2020 ◽  
Vol 20 (22) ◽  
pp. 6588
Author(s):  
Jun Ho Lee ◽  
Jae Sang Heo ◽  
Keon Woo Lee ◽  
Jae Cheol Shin ◽  
Jeong-Wan Jo ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Silver Nanowires ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Fast Response ◽  
Large Area ◽  
Site Specific ◽  
Sensing Properties ◽  
Sensing Range ◽  
Wide Range

For wearable health monitoring systems and soft robotics, stretchable/flexible pressure sensors have continuously drawn attention owing to a wide range of potential applications such as the detection of human physiological and activity signals, and electronic skin (e-skin). Here, we demonstrated a highly stretchable pressure sensor using silver nanowires (AgNWs) and photo-patternable polyurethane acrylate (PUA). In particular, the characteristics of the pressure sensors could be moderately controlled through a micro-patterned hole structure in the PUA spacer and size-designs of the patterned hole area. With the structural-tuning strategies, adequate control of the site-specific sensitivity in the range of 47~83 kPa−1 and in the sensing range from 0.1 to 20 kPa was achieved. Moreover, stacked AgNW/PUA/AgNW (APA) structural designed pressure sensors with mixed hole sizes of 10/200 µm and spacer thickness of 800 µm exhibited high sensitivity (~171.5 kPa−1) in the pressure sensing range of 0~20 kPa, fast response (100~110 ms), and high stretchability (40%). From the results, we envision that the effective structural-tuning strategy capable of controlling the sensing properties of the APA pressure sensor would be employed in a large-area stretchable pressure sensor system, which needs site-specific sensing properties, providing monolithic implementation by simply arranging appropriate micro-patterned hole architectures.

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