Mask-Based Microsphere Photolithography

Author(s):  
Chuang Qu ◽  
Edward C. Kinzel

Microsphere Photolithography (MPL) uses a self-assembled array of transparent microspheres to focus incident ultraviolet radiation and produce an array of photonic jets in photoresist. Typically, the microspheres are self-assembled directly on the photoresist layer and are removed after exposure during development. Reusing the microsphere array reduces the expense of the process. A mask is formed by transferring the self-assembled microsphere array to a transparent tape. This can be used for multiple exposures when pressed into contact with the photoresist. This paper demonstrates the use of this process to pattern infrared metasurface absorbers and discusses the effects of the mask-based MPL process on the metasurface performance.

MRS Advances ◽  
2020 ◽  
Vol 5 (64) ◽  
pp. 3507-3520
Author(s):  
Chunhui Dai ◽  
Kriti Agarwal ◽  
Jeong-Hyun Cho

AbstractNanoscale self-assembly, as a technique to transform two-dimensional (2D) planar patterns into three-dimensional (3D) nanoscale architectures, has achieved tremendous success in the past decade. However, an assembly process at nanoscale is easily affected by small unavoidable variations in sample conditions and reaction environment, resulting in a low yield. Recently, in-situ monitored self-assembly based on ion and electron irradiation has stood out as a promising candidate to overcome this limitation. The usage of ion and electron beam allows stress generation and real-time observation simultaneously, which significantly enhances the controllability of self-assembly. This enables the realization of various complex 3D nanostructures with a high yield. The additional dimension of the self-assembled 3D nanostructures opens the possibility to explore novel properties that cannot be demonstrated in 2D planar patterns. Here, we present a rapid review on the recent achievements and challenges in nanoscale self-assembly using electron and ion beam techniques, followed by a discussion of the novel optical properties achieved in the self-assembled 3D nanostructures.


Soft Matter ◽  
2021 ◽  
Author(s):  
Jiawei Lu ◽  
Xiangyu Bu ◽  
Xinghua Zhang ◽  
Bing Liu

The shapes of colloidal particles are crucial to the self-assembled superstructures. Understanding the relationship between the shapes of building blocks and the resulting crystal structures is an important fundamental question....


Soft Matter ◽  
2021 ◽  
Author(s):  
Meng Sun ◽  
Qintang Li ◽  
Xiao Chen

Luminescent gels have been successfully fabricated through the self-assembly of sodium cholate and a europium ion in choline chloride-based deep eutectic solvents.


2008 ◽  
Vol 373-374 ◽  
pp. 472-475 ◽  
Author(s):  
C.G. Sun ◽  
Hui Chen Zhang

In this work, the self-assembled monolayers of γ-aminopropyltrimethoxysilane and octadecyltrichlorosilane were prepared on titanium films, radiated and solidified by ultraviolet radiation/ozone photochemical process. The characterization and friction properties of titanium film, APS SAMs, OTS SAMs and the radiated APS SAMs, OTS SAMs were explored by atomic force microscopy and friction force microscopy. The effects of functional groups, sliding velocity, load and ultraviolet radiation/ozone photochemical process on friction properties of SAMs were analyzed. The experimental results show that the titanium film coated with SAMs, especially under ultraviolet radiation/ozone, is exhibited with a good friction property. The friction property of APS SAMs is better than OTS SAMs under or no ultraviolet radiation/ozone. The friction force increases with the increasing of sliding velocity and decreases with the increasing of load.


2017 ◽  
Vol 41 (20) ◽  
pp. 11955-11961 ◽  
Author(s):  
Haoyuan Wang ◽  
Xia Kong ◽  
Shuai Zhao ◽  
Junshi Wu ◽  
Xiyou Li ◽  
...  

High-sensitive, quick-response room-temperature sensor to NO2 and NH3 is developed, based on QLS film of a new amphiphilic tris(phthalocyaninato) europium.


2015 ◽  
Vol 3 (4) ◽  
pp. 1540-1548 ◽  
Author(s):  
Sheng Zhu ◽  
Hui Zhang ◽  
Ping Chen ◽  
Lin-Hui Nie ◽  
Chuan-Hao Li ◽  
...  

A facile protocol for the self-assembly of the rGO/β-MnO2 hybrid hydrogel with ultrafine structure and precise control of mass-loading for high performance supercapacitors is reported.


RSC Advances ◽  
2017 ◽  
Vol 7 (63) ◽  
pp. 39685-39685
Author(s):  
Vivekanandan Raman ◽  
Dinah Punnoose ◽  
Pari Baraneedharan ◽  
Sunkara Srinivasa Rao ◽  
Chandu V. V. M. Gopi ◽  
...  

Correction for ‘Study on the efficient PV/TE characteristics of the self-assembled thin films based on bismuth telluride/cadmium telluride’ by Vivekanandan Raman et al., RSC Adv., 2017, 7, 6735–6742.


2016 ◽  
Vol 27 (44) ◽  
pp. 445101 ◽  
Author(s):  
Libo Du ◽  
Siqingaowa Suo ◽  
Han Zhang ◽  
Hongying Jia ◽  
Ke Jian Liu ◽  
...  

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