Amorphous Gallium Oxide Thin Film Grown by Atomic Layer Deposition for High-Performance and Flexible Deep-Ultraviolet Photodetector

Proceedings of the 5th World Congress on New Technologies ◽

10.11159/icnfa19.138 ◽

2019 ◽

Author(s):

Kang Min Lee ◽

Se Eun Kim ◽

Hyeok Jae Lee ◽

Sang Woon Lee

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Gallium Oxide ◽

High Performance ◽

Atomic Layer ◽

Oxide Thin Film ◽

Ultraviolet Photodetector ◽

Layer Deposition ◽

Deep Ultraviolet

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8.2: High Performance Oxide Thin Film Transistors Fabricated by Atomic Layer Deposition Process

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.15043 ◽

2021 ◽

Vol 52 (S2) ◽

pp. 141-141

Author(s):

Dedong Han ◽

Huijin Li ◽

Junchen Dong ◽

Xiaobin Zhou ◽

Qi Li ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

High Performance ◽

Atomic Layer ◽

Deposition Process ◽

Oxide Thin Film ◽

Atomic Layer Deposition Process ◽

Layer Deposition

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Atomic Layer Deposition of an Indium Gallium Oxide Thin Film for Thin-Film Transistor Applications

ACS Applied Materials & Interfaces ◽

10.1021/acsami.7b04985 ◽

2017 ◽

Vol 9 (28) ◽

pp. 23934-23940 ◽

Author(s):

Jiazhen Sheng ◽

Eun Jung Park ◽

Bonggeun Shong ◽

Jin-Seong Park

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Gallium Oxide ◽

Thin Film Transistor ◽

Atomic Layer ◽

Oxide Thin Film ◽

Layer Deposition ◽

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Gas Sensors: High-Performance, Transparent Thin Film Hydrogen Gas Sensor Using 2D Electron Gas at Interface of Oxide Thin Film Heterostructure Grown by Atomic Layer Deposition (Adv. Funct. Mater. 7/2019)

Advanced Functional Materials ◽

10.1002/adfm.201970039 ◽

2019 ◽

Vol 29 (7) ◽

pp. 1970039 ◽

Author(s):

Sung Min Kim ◽

Hye Ju Kim ◽

Hae Jun Jung ◽

Ji-Yong Park ◽

Tae Jun Seok ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Gas Sensors ◽

High Performance ◽

Electron Gas ◽

Atomic Layer ◽

Hydrogen Gas ◽

Oxide Thin Film ◽

Layer Deposition

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High‐Performance, Transparent Thin Film Hydrogen Gas Sensor Using 2D Electron Gas at Interface of Oxide Thin Film Heterostructure Grown by Atomic Layer Deposition

Advanced Functional Materials ◽

10.1002/adfm.201807760 ◽

2018 ◽

pp. 1807760 ◽

Author(s):

Sung Min Kim ◽

Hye Ju Kim ◽

Hae Jun Jung ◽

Ji‐Yong Park ◽

Tae Jun Seok ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

High Performance ◽

Electron Gas ◽

Atomic Layer ◽

Hydrogen Gas ◽

Oxide Thin Film ◽

2D Electron Gas ◽

Layer Deposition

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Low-temperature high-performance In-Ga-Sn-O thin-film transistors with Al2O3 grown by a facile dual-atomic layer deposition

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2021.160053 ◽

2021 ◽

pp. 160053

Author(s):

Hyunjae Jang ◽

Changyong Oh ◽

Tae Hyun Kim ◽

Hyeong Wook Kim ◽

Sang Ik Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

High Performance ◽

Atomic Layer ◽

Layer Deposition

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Enhancement of Electrical Stability in Oxide Thin-Film Transistors Using Multilayer Channels Grown by Atomic Layer Deposition

IEEE Transactions on Electron Devices ◽

10.1109/ted.2013.2288925 ◽

2014 ◽

Vol 61 (1) ◽

pp. 73-78 ◽

Author(s):

Cheol Hyoun Ahn ◽

Myung Gu Yun ◽

Sang Yeol Lee ◽

Hyung Koun Cho

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

Atomic Layer ◽

Oxide Thin Film ◽

Electrical Stability ◽

Layer Deposition

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High-performance ZnO thin-film transistor fabricated by atomic layer deposition

Semiconductor Science and Technology ◽

10.1088/0268-1242/26/8/085007 ◽

2011 ◽

Vol 26 (8) ◽

pp. 085007 ◽

Author(s):

Byeong-Yun Oh ◽

Young-Hwan Kim ◽

Hee-Jun Lee ◽

Byoung-Yong Kim ◽

Hong-Gyu Park ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

High Performance ◽

Thin Film Transistor ◽

Atomic Layer ◽

Zno Thin Film ◽

Layer Deposition

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Effects of Deposition Temperature on the Device Characteristics of Oxide Thin-Film Transistors Using In–Ga–Zn–O Active Channels Prepared by Atomic-Layer Deposition

ACS Applied Materials & Interfaces ◽

10.1021/acsami.7b04637 ◽

2017 ◽

Vol 9 (27) ◽

pp. 22676-22684 ◽

Author(s):

Sung-Min Yoon ◽

Nak-Jin Seong ◽

Kyujeong Choi ◽

Gi-Ho Seo ◽

Woong-Chul Shin

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

Deposition Temperature ◽

Atomic Layer ◽

Oxide Thin Film ◽

Layer Deposition ◽

Active Channels

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Plasma-Enhanced Atomic Layer Deposition Processed SiO2 Gate Insulating Layer for High Mobility Top-Gate Structured Oxide Thin-Film Transistors

IEEE Electron Device Letters ◽

10.1109/led.2015.2504931 ◽

2016 ◽

Vol 37 (1) ◽

pp. 39-42 ◽

Author(s):

Jong Beom Ko ◽

Hye In Yeom ◽

Sang-Hee Ko Park

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

High Mobility ◽

Atomic Layer ◽

Oxide Thin Film ◽

Insulating Layer ◽

Layer Deposition

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Indium oxide thin film prepared by low temperature atomic layer deposition using liquid precursors and ozone oxidant

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2015.07.150 ◽

2015 ◽

Vol 649 ◽

pp. 216-221 ◽

Author(s):

W.J. Maeng ◽

Dong-Won Choi ◽

Jozeph Park ◽

Jin-Seong Park

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Indium Oxide ◽

Atomic Layer ◽

Oxide Thin Film ◽

Liquid Precursors ◽

Layer Deposition ◽

Indium Oxide Thin Film

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