Mechanism of ArF resist-pattern shrinkage in critical-dimension scanning electron microscopy measurement
2004 ◽
Vol 22
(1)
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pp. 226
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2011 ◽
Vol 10
(1)
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pp. 013010
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2010 ◽
Vol 50
(9-11)
◽
pp. 1407-1412
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2010 ◽
Vol 28
(6)
◽
pp. C6H34-C6H39
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