Engineering crystallinity of atomic layer deposited gate stacks containing ultrathin HfO2and a Ti-based metal gate: Effects of postmetal gate anneal and integration schemes
2014 ◽
Vol 32
(3)
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pp. 03D122
2009 ◽
Vol 24
(12)
◽
pp. 125013
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Keyword(s):
Electrical Characterization of Postmetal Annealed Ultrathin TiN Gate Electrodes in Si MOS Capacitors
2016 ◽
Vol 2016
◽
pp. 1-4
◽
Keyword(s):
Keyword(s):
Keyword(s):