Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
2018 ◽
Vol 36
(6)
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pp. 06A105
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2019 ◽
Vol 37
(6)
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pp. 060905
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2020 ◽
Vol 38
(3)
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pp. 032403
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Keyword(s):
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2019 ◽
Vol 35
(7)
◽
pp. 720-731
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