Summary Abstract: Measurement of semiconductor–insulator interface states by constant‐capacitance deep‐level transient spectroscopy

Deep Level ◽

Interface States ◽

Insulator Interface ◽

Measurement of semiconductor–insulator interface states by constant‐capacitance deep‐level transient spectroscopy

Journal of Vacuum Science and Technology ◽

10.1116/1.571768 ◽

1982 ◽

Vol 21 (2) ◽

pp. 303-314 ◽

Cited By ~ 120

Author(s):

N. M. Johnson

Keyword(s):

Deep Level ◽

Interface States ◽

Insulator Interface ◽

Time‐dependent response of interface states in indium phosphide metal–insulator–semiconductor capacitors investigated with constant‐capacitance deep‐level transient spectroscopy

Journal of Applied Physics ◽

10.1063/1.332582 ◽

1983 ◽

Vol 54 (7) ◽

pp. 4014-4021 ◽

Cited By ~ 66

Author(s):

P. van Staa ◽

H. Rombach ◽

R. Kassing

Keyword(s):

Indium Phosphide ◽

Deep Level ◽

Interface States ◽

Time Dependent ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

A deep-level transient spectroscopy study of silicon interface states using different silicon nitride surface passivation schemes

Applied Physics Letters ◽

10.1063/1.3358140 ◽

2010 ◽

Vol 96 (10) ◽

pp. 103507 ◽

Cited By ~ 18

Author(s):

Chun Gong ◽

Eddy Simoen ◽

Niels Posthuma ◽

Emmanuel Van Kerschaver ◽

Jef Poortmans ◽

...

Keyword(s):

Silicon Nitride ◽

Surface Passivation ◽

Deep Level ◽

Interface States ◽

Spectroscopy Study ◽

Transient Spectroscopy ◽

Silicon Interface

Study of metal-semiconductor interface states using deep level transient spectroscopy

Applied Physics A Solids and Surface ◽

10.1007/bf00616702 ◽

1987 ◽

Vol 44 (3) ◽

pp. 273-277 ◽

Cited By ~ 6

Author(s):

H. Zhang ◽

Y. Aoyagi ◽

S. Iwai ◽

S. Namba

Keyword(s):

Deep Level ◽

Interface States ◽

Semiconductor Interface ◽

A Deep-Level Transient Spectroscopy Comparison of the SiO2/Si and Al2O3/Si Interface States

ECS Transactions ◽

10.1149/1.3628607 ◽

2019 ◽

Vol 41 (4) ◽

pp. 37-44 ◽

Cited By ~ 1

Author(s):

Eddy Simoen ◽

Aude Rothschild ◽

Bart Vermang ◽

Jef Poortmans ◽

Robert Mertens

Keyword(s):

Deep Level ◽

Interface States ◽

Deep Level Transient Spectroscopy of Bulk Traps and Interface States in Si MOS Diodes

Japanese Journal of Applied Physics ◽

10.1143/jjap.18.113 ◽

1979 ◽

Vol 18 (1) ◽

pp. 113-122 ◽

Cited By ~ 243

Author(s):

Kimiyoshi Yamasaki ◽

Minoru Yoshida ◽

Takuo Sugano

Keyword(s):

Deep Level ◽

Interface States ◽

A study of the interface states in MIS-structures with thin SiO2 and SiOxNy layers using deep level transient spectroscopy

Microelectronics Reliability ◽

10.1016/s0026-2714(98)00235-2 ◽

1999 ◽

Vol 39 (2) ◽

pp. 297-302 ◽

Cited By ~ 10

Author(s):

R. Beyer ◽

H. Burghardt ◽

E. Thomas ◽

R. Reich ◽

D.R.T. Zahn ◽

...

Keyword(s):

Deep Level ◽

Interface States ◽

Transient Spectroscopy ◽

Mis Structures

Deep-Level Transient Spectroscopy of Interface States in ZnO/PrCoOx/ZnO Thin-Film Junctions

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.l1429 ◽

1992 ◽

Vol 31 (Part 2, No. 10A) ◽

pp. L1429-L1431 ◽

Cited By ~ 8

Author(s):

Yoshihiko Yano ◽

Yukihiko Shirakawa ◽

Hisao Morooka

Keyword(s):

Thin Film ◽

Deep Level ◽

Interface States ◽

Zno Thin Film ◽

Low-temperature fabrication of Y2O3/Ge gate stacks with ultrathin GeOx interlayer and low interface states density characterized by a reliable deep-level transient spectroscopy method

Thin Solid Films ◽

10.1016/j.tsf.2013.10.065 ◽

2014 ◽

Vol 557 ◽

pp. 288-291 ◽

Cited By ~ 2

Author(s):

Dong Wang ◽

Yuta Nagatomi ◽

Shuta Kojima ◽

Keisuke Yamamoto ◽

Hiroshi Nakashima

Keyword(s):

Low Temperature ◽

Deep Level ◽

Interface States ◽

Spectroscopy Method ◽

Gate Stacks ◽

Evaluation of Interface States in ZnO Varistors by Spectral Analysis of Deep Level Transient Spectroscopy

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.899 ◽

1999 ◽

Vol 38 (Part 1, No. 2A) ◽

pp. 899-900 ◽

Cited By ~ 13

Author(s):

Yasuhiro Ohbuchi ◽

Junya Yoshino ◽

Yoichi Okamoto ◽

Jun Morimoto

Keyword(s):

Spectral Analysis ◽

Deep Level ◽

Interface States ◽

Zno Varistors ◽