Zirconium silicate thin films for antireflection coatings

1996 ◽  
Vol 14 (3) ◽  
pp. 795-799 ◽  
Author(s):  
J. D. Barrie ◽  
E. L. Fletcher
2016 ◽  
Vol 99 (8) ◽  
pp. 2729-2736 ◽  
Author(s):  
Jon F. Ihlefeld ◽  
Emily Gurniak ◽  
Brad H. Jones ◽  
David R. Wheeler ◽  
Mark A. Rodriguez ◽  
...  

2003 ◽  
Vol 27 (1-2) ◽  
pp. 65-69 ◽  
Author(s):  
E. Vainonen-Ahlgren ◽  
E. Tois ◽  
T. Ahlgren ◽  
L. Khriachtchev ◽  
J. Marles ◽  
...  

In this paper, an efficient, spin-spray pyrolysis unit is designed and constructed for the deposition of oxide thin films. The system is an effective combination of two independent techniques such as spin and spray methods. The rotation of the substrate by keeping the spray nozzle stationary makes the system unique. The system allows the decomposition of the solution before reaching the substrate. Spin-spray pyrolysis unit is capable of coating thin films on different substrates like float glass, FTO coated glass, and Aluminum coated glass, Teflon, and kepton, of dimensions up to 4-inch diameter, any contour and scalable to industrial applications. Metal oxides like Al2O3, GZO, ZnO etc., can be coated for many applications such as solar cells, thin-film transistors, sensors, etc. The elements required for construction of spray pyrolysis units are a heater, spray nozzle, thermocouple, solution feeding unit, airflow assembly, substrate rotator, and exhaust assembly. The elements of the system are discussed in accordance with the cost estimation. The working principle of each element of the system is explained in a separate block diagram. The system is optimized for deposition of ZnO thin films on a glass substrate and is characterized. The thinfilms can be used for development of TFT’s, heaters, thermistors, piezo-electronics devices, sensors, antireflection coatings and solar cell.


2018 ◽  
Vol 461 ◽  
pp. 249-254 ◽  
Author(s):  
Ľubomír Scholtz ◽  
Pavel Šutta ◽  
Pavel Calta ◽  
Petr Novák ◽  
Michaela Solanská ◽  
...  

MRS Bulletin ◽  
1996 ◽  
Vol 21 (6) ◽  
pp. 49-54 ◽  
Author(s):  
B.A. Tuttle ◽  
R.W. Schwartz

Solution deposition has been used by almost every electroceramic research-and-development organization throughout the world to evaluate thin films. Ferrite, high-temperature-superconductor, dielectric, and antireflection coatings are among the electroceramics for which solution deposition has had a significant impact. Lithium niobate, lithium tantalate, potassium niobate, lead scandium tantalate, lead magnesium niobate, and bismuth strontium tantalate are among the ferroelectric thin films processed by solution deposition. However, lead zir-conate titanate (PZT) thin films have received the most intensive study and will be emphasized in this article.Solution deposition facilitates stoichiometric control of complex mixed oxides better than other techniques such as sputter deposition and metalorganic chemical vapor deposition (MOCVD). Solution deposition is a fast, cost-efficient method to survey extensive ranges of film composition. Further it is a process compatible with many semiconductor-fabrication technologies, and it may be the deposition method of choice for applications that do not require conformal depositions and that have device dimensions of 2 μm or greater. Specific applications for which solution deposition is commercially viable include decoupling capacitors, uncooled pyroelectric infrared detectors, piezoelectric micromotors, and chemical microsensors based on surface-acoustic-wave technology. Reviews of some of the more fundamental aspects of solution-deposition processing may be found in the scientific literature.


Materials ◽  
2018 ◽  
Vol 11 (10) ◽  
pp. 1840
Author(s):  
Dong Xu ◽  
Qian Yu ◽  
Taiyun Chen ◽  
Sujuan Zhong ◽  
Jia Ma ◽  
...  

ZnO porous thin films were synthesized as antireflection coatings via a sol–gel dip-coating method with polyethylene glycol (PEG1000) utilized as a polymeric porogen on alumina transparent ceramics. The pore formation mechanism of the ZnO porous thin films was proposed through thermal and Fourier transformation infrared spectrometer (FTIR) analyses. The effect of sol concentrations on crystal structure, microstructure, and optical properties was also discussed. The experiment results indicated that all the ZnO thin films exhibited a hexagonal wurtzite structure with their preferred orientation along a (0 0 2) plane by X-ray diffraction (XRD) patterns. The grain size of the films increased from 30.5 to 37.4 nm with the sol concentration ranging from 0.2 to 1.0 M. Furthermore, scanning electron microscopy (SEM) images show that the pores on the surface were observed to first decrease as the sol concentration increased and then to disappear as the sol concentration continued to increase. The UV spectrum presents a maximum transmittance of 93.5% at a wavelength of 600 nm at a concentration of 0.6 M, which will be helpful in the practical applications of ZnO porous film on alumina transparent ceramic substrates. The pore formation mechanism of ZnO porous thin films can be ascribed to ring-like network structures between the PEG1000 and zinc oligomers under the phase separation effect.


2013 ◽  
Vol 1 (12) ◽  
pp. 2266 ◽  
Author(s):  
Xiao Li ◽  
Xinhong Yu ◽  
Yanchun Han

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