Direct comparison of line edge roughness measurements by SEM and a metrological tilting-atomic force microscopy for reference metrology
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2013 ◽
Vol 12
(4)
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pp. 041308
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2010 ◽
Vol 81
(12)
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pp. 123703
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1999 ◽
Vol 17
(6)
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pp. 2723
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1995 ◽
Vol 13
(2)
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pp. 344
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2002 ◽
Vol 8
(5)
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pp. 422-428
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