Effect of tip shape on line edge roughness measurement based on atomic force microscopy

2010 ◽  
Vol 81 (12) ◽  
pp. 123703 ◽  
Author(s):  
Ning Li ◽  
Fei Wang ◽  
Xuezeng Zhao
Keyword(s):  
Atomic Force Microscopy ◽  
Line Edge Roughness ◽  
Roughness Measurement ◽  
Force Microscopy ◽  
Atomic Force ◽  
Edge Roughness ◽  
On Line

scholarly journals Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy

2016 ◽  
Vol 49 (3) ◽  
pp. 823-834 ◽  
Author(s):  
Hyo Seon Suh ◽  
Xuanxuan Chen ◽  
Paulina A. Rincon-Delgadillo ◽  
Zhang Jiang ◽  
Joseph Strzalka ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Grazing Incidence ◽  
Line Edge Roughness ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Edge Roughness ◽  
Average Shape ◽  
Polymer Gratings

Grazing-incidence small-angle X-ray scattering (GISAXS) is increasingly used for the metrology of substrate-supported nanoscale features and nanostructured films. In the case of line gratings, where long objects are arranged with a nanoscale periodicity perpendicular to the beam, a series of characteristic spots of high-intensity (grating truncation rods, GTRs) are recorded on a two-dimensional detector. The intensity of the GTRs is modulated by the three-dimensional shape and arrangement of the lines. Previous studies aimed to extract an average cross-sectional profile of the gratings, attributing intensity loss at GTRs to sample imperfections. Such imperfections are just as important as the average shape when employing soft polymer gratings which display significant line-edge roughness. Herein are reported a series of GISAXS measurements of polymer line gratings over a range of incident angles. Both an average shape and fluctuations contributing to the intensity in between the GTRs are extracted. The results are critically compared with atomic force microscopy (AFM) measurements, and it is found that the two methods are in good agreement if appropriate corrections for scattering from the substrate (GISAXS) and contributions from the probe shape (AFM) are accounted for.

The Study of Nanolithography Processing on the Photoresistor Thin Film by Atomic Force Microscopy

2014 ◽  
Vol 997 ◽  
pp. 379-382
Author(s):  
Jen Ching Huang ◽  
Fu Jen Cheng
Keyword(s):  
Thin Films ◽  
Atomic Force Microscopy ◽  
Groove Depth ◽  
Cutting Depth ◽  
Contact Mode ◽  
Force Microscopy ◽  
Atomic Force ◽  
On Line ◽  
Afm Probe ◽  
Mode Atomic Force Microscopy

In this paper, the nanomachining experiments on the SPR3001 photoresistor thin films were processing by contact mode atomic force microscopy (AFM). After the experiment, it can be found, in the nanomachining, the greater the indented distance along the Z-axis depth, carved out of the groove depth and groove width of nanoline is greater. The influences of cutting directions on line width and cutting depth during nanomachining were quite a few and the cutting situation was stable by lateral nanomachining. This article also successfully processed the regular hexagonal nanopattern, also proves the nanomachining ability of the AFM probe is good at nanoscale patterned on photoresistor thin films.

scholarly journals The technique of articular rabbit cartilage roughness measurement and analysis of the effect of PRP in knee osteoarthritis therapy using atomic force microscopy

2020 ◽  
Author(s):  
Ihnatouski M. Mikhail ◽  
Jolanta Pauk ◽  
Dmitrij Karev ◽  
Borys Karev
Keyword(s):  
Mechanical Properties ◽  
Atomic Force Microscopy ◽  
Knee Osteoarthritis ◽  
Hyaline Cartilage ◽  
Control Group ◽  
Roughness Measurement ◽  
Force Microscopy ◽  
Atomic Force ◽  
Healthy Rabbit ◽  
Rabbit Cartilage

AbstractHyaline cartilage undergoes degenerative-dystrophic changes with subsequent involvement of the subchondral bone. The purpose of this study was developing a new AFM-based method to articular rabbit cartilage roughness measurement, followed by an investigation of whether platelet-rich plasma therapy of knee osteoarthritis has a positive impact on mechanical properties of rabbit cartilage. The rabbits were randomly divided into two groups: the control group (N=6) and the patients (N=12). Saline (0.5 ml) and 10% surgical talc solution were injected into the right knee of 12 rabbits to induce osteoarthritis. Six rabbits underwent PRP therapy, while the other six did not receive treatment. The mechanical properties and the submicron surface morphology rabbit hyaline cartilage were investigated using atomic force microscopy (AFM). In the group of specimens worn out by induced osteoarthritis, the maximum arithmetic average of absolute values (Ra) change was a 23% increase; the maximum peak height (Rp) increased by over 100%, while the mean spacing between local peaks (S) increased by 26%, compared to healthy rabbit cartilage (p<0.05). In the group of specimens worn out by induced osteoarthritis and cured with PRP therapy, Ra increased by 13%; Rp increased by 33%, while S decreased by 77%, compared to healthy rabbit cartilage (p<0.05). It was found that the mechanical properties of hyaline cartilage deteriorate under the influence of simulated osteoarthritis. The results of PRP treatment in rabbits may constitute a step forward to further relevant studies involving OA patients.

Sidewall roughness measurement inside photonic crystal holes by atomic force microscopy

2007 ◽  
Vol 18 (40) ◽  
pp. 405703 ◽  
Author(s):  
P Strasser ◽  
F Robin ◽  
C F Carlström ◽  
R Wüest ◽  
R Kappeler ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Photonic Crystal ◽  
Roughness Measurement ◽  
Sidewall Roughness ◽  
Force Microscopy ◽  
Atomic Force
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