PULSED ELECTROCHEMICAL MICRO MACHINING OF INVAR (FE-NI) FILM USING AN ELECTRODE ARRAY
Recently, invar (Fe-Ni) material has been applied to OLED shadow masks due to its thermal change characteristics and thermal expansion coefficient. The most widely used manufacturing methods for invar are etching and laser machining, but they have problems like non-machined areas generated by etching and surface burning in laser machining. For this reason, an alternative machining method is necessary. In this study, pulsed electrochemical machining (PECM) has been applied to fabricate an OLED shadow mask. PECM is a highly promising technology for shadow mask manufacturing because it can produce micro-scale and complex tapered holes in one process. A pilot experiment was carried out to find a suitable electrolyte for invar film, and an array of coated Ti electrodes was used to fabricate micro holes.