FIELD EMISSION FROM CARBON FILMS GROWN BY THE CATHODIC ARC PROCESS

2000 ◽  
Vol 14 (02n03) ◽  
pp. 301-307 ◽  
Author(s):  
W. I. MILNE ◽  
J. ROBERTSON ◽  
B. S. SATYANARAYANA ◽  
A. HART

By using the catholic vacuum are deposition process, carbon films with variable sp 3/ sp 2 bonding ratio can be deposited on a variety of substrates at room temperature. The morphology of the films can be varied from the mirror like smooth tetrahedrally bonded carbon (ta-C) films through nanocluster to fibrous type carbon by altering the deposition parameters. This paper reviews the work carried out on Field Emission from such carbon films and compares the results with those on nanocluster films prepared using supersonic cluster beams. Threshold fields as low as 1 V /μ m with emission site densities of up to 104-105/ cm 2 have been obtained.

2000 ◽  
Vol 621 ◽  
Author(s):  
B.S. Satyanarayana ◽  
K. Nishimura ◽  
A. Hiraki ◽  
W.I. Milne

ABSTRACTNovel heterostructured cold cathodes made of nanoseeded diamond and cathodic arc process grown nanocluster carbon films, were studied. The nanocrystalline diamond with varying diamond concentration was first coated on to the substrate. The nanocluster carbon films were then deposited on the nanoseeded diamond coated substrates using the cathodic arc process at room temperature. The resultant heterostructured microcathodes were observed to exhibit electron emission currents of 1μA/cm2 at low fields of 1.2 - 5 V/μm. Further some of the samples seem to exhibit I-V characteristics with a negative differential resistance region at room temperature conditions. This negative differential resistance or the resonant tunneling behaviour was observed to be dependent on the nanoseeded diamond concentration.


1999 ◽  
Vol 593 ◽  
Author(s):  
W.I. Milne ◽  
B.S. Satyanarayana ◽  
J. Robertson

ABSTRACTCarbon films with variable sp3/sp2 bonding ratio can be deposited on a variety of substrates at room temperature, using the cathodic vacuum arc deposition process. The variation in their surface morphology as a function of He and N2partial pressure during growth have been investigated and it has been shown that the morphology of the films can be varied from the mirror like smooth tetrahedrally bonded carbon (ta-C) films through nanocluster to fibrous type carbon. This paper reviews the work carried out on Field Emission from these various carbon films. Threshold fields as low as 1 V/μm for emission current densities of 1 μA/cm2 and emission site densities of up to 104 -105/cm2 have been obtained.


1997 ◽  
Vol 471 ◽  
Author(s):  
W. I. Milne ◽  
J. Robertson ◽  
B. S. Satyanarayanan ◽  
A. Hart

ABSTRACTA series of tetrahedrally bonded carbon (ta-C) films have been produced using a Filtered Cathodic Vacuum Arc System. The threshold field and current densities achievable have been investigated as a function of sp3/sp2 bonding ratio and nitrogen content. Typical undoped ta-C films have a threshold field of 15–20V/μm and optimally nitrogen doped films exhibit threshold fields as low as ∼ 5 V/μm. Current densities of typically 10-4 A/cm2 at an applied field of 20V/micron were also obtained.


1998 ◽  
Vol 509 ◽  
Author(s):  
A.N. Titkov ◽  
A.I. Kosarev ◽  
A.J. Vinogradov ◽  
Z. Waqar ◽  
I.V. Makarenko ◽  
...  

AbstractThe effect of deposition parameters and substrate on the morphology of carbon films prepared in VHF plasma at low temperature has been studied by Atomic Force Microscopy. Carbon films demonstrating superior emission characteristics were the smoothest, but not all of the smoothest films demonstrated good emission. Significant influence of pre-growth treatment of the substrate surface on the emission characteristics of the films was found.


2016 ◽  
Vol 368 ◽  
pp. 77-81
Author(s):  
Miroslav Béger ◽  
Jozef Sondor ◽  
Martin Sahul ◽  
Paulína Zacková ◽  
Marián Haršáni ◽  
...  

The article deals with the influence of different deposition parameters on the selected properties of AlCrN/Si3N4 nanocomposite coatings. Bias voltage, cathodes currents and working gas pressure were changed during the deposition process. All coatings were deposited using Lateral Rotating Cathodes (LARC®) process that belongs to the group of cathodic arc evaporation PVD technologies. In comparison with the typical cathodic arc evaporation process which usually uses planar targets the LARC® process utilizes rotational cathodes that are positioned close to each other. Nanohardness, Young's modulus, thickness and residual stresses were determinated in order to evaluate the influence of deposition parameters on these coatings properties


2001 ◽  
Vol 685 ◽  
Author(s):  
B.S. Satyanarayana ◽  
K. Nishimura ◽  
A. Hiraki

AbstractLow field electron emission from novel room temperature grown multilayered cold cathodes were studied. The cathodes consisted of a layer of nanocrystalline diamond and a layer of nanocluster carbon films. The nanocrystalline diamond was first coated on to the substrate. The nanocluster carbon films and the tetrahedral amorphous carbon films were then deposited on the nanocrystalline diamond coated substrates using the cathodic arc process at room temperature. The heterostructured microcathodes were observed to exhibit electron emission currents of 1µA/cm2 at fields as low as 1 V/µm. The effect of the nanoseeded diamond size and concentration and the properties of different nanocluster carbon films on emission characteristics is presented.


1995 ◽  
Vol 397 ◽  
Author(s):  
Ashok Kumar ◽  
R. B. Inturi ◽  
Y. Vohra ◽  
U. Ekanayake ◽  
N. Shu ◽  
...  

ABSTRACTDiamond-like carbon (DLC) films have a unique combination of physical and chemical properties such as high hardness, optical transparency, low coefficient of friction and chemical inertness. A pulsed laser (248 nm) has been used to ablate a pyrolytic graphite target to deposit DLC films on Si (100) and 7059 Corning glass substrates. The deposition was carried out in high vacuum (≤ 10−6 Torr) at different temperatures ranging from room temperature to 400°C. The films were characterized by x-ray diffraction, scanning electron microscope, and Raman spectroscopie techniques. The mechanical properties (hardness and Young's modulus) of these films were characterized by nanoindentation. We have found that the films deposited at room temperature and 100°C show the characteristic features of DLC films and have the better hardness and modulus properties compared to the films fabricated at higher temperatures, which transform into amorphous carbon. Correlations of pulsed laser deposition process parameters with the properties of deposited DLC films will be discussed in this paper.


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