Etching Behavior and Damage Rejuvenation of Top Electrode and Bi3.15Nd0.85Ti3O12Films Applied in Ferroelectric Random Access Memory Devices
2002 ◽
Vol 41
(Part 1, No. 11B)
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pp. 6749-6753
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2003 ◽
Vol 48
(4)
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pp. 275-371
◽
2002 ◽
Vol 41
(Part 1, No. 11B)
◽
pp. 6709-6713
◽
Keyword(s):
2001 ◽
Vol 40
(Part 1, No. 11)
◽
pp. 6566-6573
◽
Keyword(s):
2020 ◽
Vol 12
(2)
◽
pp. 02008-1-02008-4
Keyword(s):