Etching Behavior and Damage Rejuvenation of Top Electrode and Bi3.15Nd0.85Ti3O12Films Applied in Ferroelectric Random Access Memory Devices

2009 ◽  
Vol 48 (5) ◽  
pp. 050209
Author(s):  
Dan Xie ◽  
Wenkao Yu ◽  
Yafeng Luo ◽  
Kanhao Xue ◽  
Tianling Ren ◽  
...  
2020 ◽  
Vol 12 (2) ◽  
pp. 02008-1-02008-4
Author(s):  
Pramod J. Patil ◽  
◽  
Namita A. Ahir ◽  
Suhas Yadav ◽  
Chetan C. Revadekar ◽  
...  

2012 ◽  
Vol 21 (6) ◽  
pp. 065201 ◽  
Author(s):  
Jian-Wei Zhao ◽  
Feng-Juan Liu ◽  
Hai-Qin Huang ◽  
Zuo-Fu Hu ◽  
Xi-Qing Zhang

Sign in / Sign up

Export Citation Format

Share Document