Integration of Ferroelectric Random Access Memory Devices with Ir/IrO2/Pb(ZrxTi1-x)\barO3/Ir Capacitors Formed by Metalorganic Chemical Vapor Deposition-Grown Pb(ZrxTi1-x)O3
2002 ◽
Vol 41
(Part 1, No. 11B)
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pp. 6709-6713
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1995 ◽
Vol 24
(8)
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pp. 1023-1027
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1994 ◽
Vol 33
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pp. 5139-5142
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2002 ◽
Vol 41
(Part 1, No. 11B)
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pp. 6690-6694
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2015 ◽
Vol 48
(26)
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pp. 265203
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2001 ◽
Vol 30
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pp. 1532-1536
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Vol 21
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pp. 319-329
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2019 ◽
Vol 103
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pp. 104614