Suppression of Defects during Metal-Induced Lateral Crystallization of Polycrystalline-Silicon Thin Films by Directed Lateral Growth

2009 ◽  
Vol 48 (9) ◽  
pp. 091203 ◽  
Author(s):  
Kuninori Kitahara ◽  
Junji Kambara ◽  
Mitsunori Kobata ◽  
Hiroshi Tsuda
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Lateral Growth ◽  
Silicon Thin Films ◽  
Lateral Crystallization

Formation of (100)-oriented large polycrystalline silicon thin films with multiline beam continuous-wave laser lateral crystallization

2018 ◽  
Vol 57 (3) ◽  
pp. 031302 ◽  
Author(s):  
Thi Thuy Nguyen ◽  
Mitsuhisa Hiraiwa ◽  
Tomoyuki Koganezawa ◽  
Satoshi Yasuno ◽  
Shin-Ichiro Kuroki
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Continuous Wave ◽  
Continuous Wave Laser ◽  
Silicon Thin Films ◽  
Wave Laser ◽  
Lateral Crystallization

In situ excimer laser irradiation as cleaning tool for solid phase epitaxy of laser crystallized polycrystalline silicon thin films

2013 ◽  
Vol 210 (12) ◽  
pp. 2729-2735 ◽  
Author(s):  
Ingmar Höger ◽  
Thomas Schmidt ◽  
Anja Landgraf ◽  
Martin Schade ◽  
Annett Gawlik ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Solid Phase ◽  
Solid Phase Epitaxy ◽  
Silicon Thin Films ◽  
Excimer Laser Irradiation

Heat Treatment of Amorphous and Polycrystalline Silicon Thin Films with High-Pressure H2O Vapor

1998 ◽  
Vol 37 (Part 1, No. 8) ◽  
pp. 4254-4257 ◽  
Author(s):  
Toshiyuki Sameshima ◽  
Mitsuru Satoh ◽  
Keiji Sakamoto ◽  
Kentaro Ozaki ◽  
Keiko Saitoh
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
High Pressure ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films
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