Effects of CF4Plasma Treatment on pH and pNa Sensing Properties of Light-Addressable Potentiometric Sensor with a 2-nm-Thick Sensitive HfO2Layer Grown by Atomic Layer Deposition

2011 ◽  
Vol 50 (4) ◽  
pp. 04DL06 ◽  
Author(s):  
Chi-Hang Chin ◽  
Tseng-Fu Lu ◽  
Jer-Chyi Wang ◽  
Jung-Hsiang Yang ◽  
Cheng-En Lue ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Potentiometric Sensor ◽  
Sensing Properties ◽  
Layer Deposition ◽  
Light Addressable Potentiometric Sensor

VERTICAL SILICON NANOWIRES WITH ATOMIC LAYER DEPOSITION WITH HfO2 MEMBRANE FOR pH SENSING APPLICATION

2011 ◽  
Vol 11 (05) ◽  
pp. 959-966 ◽  
Author(s):  
YI-TING LIN ◽  
YU-HONG YU ◽  
YU CHEN ◽  
GUO-JUN ZHANG ◽  
SHI-YANG ZHU ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Silicon Nanowires ◽  
Atomic Layer ◽  
Hafnium Dioxide ◽  
Hydrogen Ion ◽  
Ion Concentration ◽  
Hydrogen Ion Concentration ◽  
Sensing Properties ◽  
Layer Deposition ◽  
Sensing Membrane

Vertical silicon nanowire (SiNW) platforms are candidates for use in ultrasensitive biosensors, with surface-to-volume ratio higher than one-dimensional SiNW . In this paper, a vertical SiNW electrolyte–insulator–semiconductor (EIS) structure with an ALD-HfO2 sensing membrane is proposed for use in a hydrogen ion sensor. Hafnium dioxide is used as the sensing membrane, which was deposited on the surface of the vertical SiNW structure by atomic layer deposition. The sensing properties were examined using a HP4284A high-precision LCR analyzer. A linear relationship was found between the flatband voltage shift and the hydrogen ion concentration. Comparing with different diameters of SiNW , the sensitivity with diameter of 200 nm was slightly higher than 100 nm. A post-deposition rapid thermal annealing (RTA) was utilized to optimize the sensing properties, and the sensitivity was increased to 51.07 mV/pH.

Enhancing the Photon-Sensing Properties of ZnO Nanowires by Atomic Layer Deposition of Platinum

2010 ◽  
Vol 13 (12) ◽  
pp. K93 ◽  
Author(s):  
Yu-Hung Lin ◽  
Yang-Chih Hsueh ◽  
Chih-Chieh Wang ◽  
Jyh-Ming Wu ◽  
Tsong-Pyng Perng ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Nanowires ◽  
Sensing Properties ◽  
Layer Deposition

Gas sensing properties of epitaxial SnO2 thin films prepared by atomic layer deposition

2003 ◽  
Vol 93 (1-3) ◽  
pp. 552-555 ◽  
Author(s):  
A. Rosental ◽  
A. Tarre ◽  
A. Gerst ◽  
J. Sundqvist ◽  
A. Hårsta ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Gas Sensing ◽  
Atomic Layer ◽  
Sensing Properties ◽  
Layer Deposition ◽  
Gas Sensing Properties ◽  
Sno2 Thin Films

scholarly journals Gas sensing properties of very thin TiO2films prepared by atomic layer deposition (ALD)

2014 ◽  
Vol 559 ◽  
pp. 012013 ◽  
Author(s):  
S Boyadjiev ◽  
V Georgieva ◽  
L Vergov ◽  
Zs Baji ◽  
F Gáber ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Gas Sensing ◽  
Atomic Layer ◽  
Sensing Properties ◽  
Layer Deposition ◽  
Gas Sensing Properties

scholarly journals The Effect of Film Thickness on the Gas Sensing Properties of Ultra-Thin TiO2 Films Deposited by Atomic Layer Deposition

Sensors ◽  
2018 ◽  
Vol 18 (3) ◽  
pp. 735 ◽  
Author(s):  
Rachel Wilson ◽  
Cristian Simion ◽  
Christopher Blackman ◽  
Claire Carmalt ◽  
Adelina Stanoiu ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Film Thickness ◽  
Gas Sensing ◽  
Atomic Layer ◽  
Tio2 Films ◽  
Sensing Properties ◽  
Layer Deposition ◽  
Gas Sensing Properties

Application of Atomic Layer Deposition in Dye-Sensitized Photoelectrosynthesis Cells

2021 ◽  
Vol 3 (1) ◽  
pp. 59-71
Author(s):  
Degao Wang ◽  
Qing Huang ◽  
Weiqun Shi ◽  
Wei You ◽  
Thomas J. Meyer
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dye Sensitized ◽  
Layer Deposition
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