Surface Acoustic Wave Properties of Amorphous Ta$_{2}$O$_{5}$ and Nb$_{2}$O$_{5}$ Thin Films Prepared by Radio Frequency Sputtering

2012 ◽  
Vol 51 ◽  
pp. 07GA01 ◽  
Author(s):  
Shoji Kakio ◽  
Keiko Hosaka ◽  
Mototaka Arakawa ◽  
Yuji Ohashi ◽  
Jun-ichi Kushibiki
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Radio Frequency ◽  
Surface Acoustic Wave ◽  
Radio Frequency Sputtering ◽  
Wave Properties

Surface Acoustic Wave Properties of Amorphous Ta2O5and Nb2O5Thin Films Prepared by Radio Frequency Sputtering

2012 ◽  
Vol 51 (7S) ◽  
pp. 07GA01 ◽  
Author(s):  
Shoji Kakio ◽  
Keiko Hosaka ◽  
Mototaka Arakawa ◽  
Yuji Ohashi ◽  
Jun-ichi Kushibiki
Keyword(s):  
Acoustic Wave ◽  
Radio Frequency ◽  
Surface Acoustic Wave ◽  
Radio Frequency Sputtering ◽  
Wave Properties

Experimental Surface Acoustic Wave Properties of AlN Thin Films on Sapphire Substrates

1997 ◽  
Vol 36 (Part 1, No. 1A) ◽  
pp. 307-312 ◽  
Author(s):  
Kiyoshi Kaya ◽  
Hiroshi Takahashi ◽  
Yoshihiko Shibata ◽  
Yasuhito Kanno ◽  
Toshio Hirai
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Sapphire Substrates ◽  
Experimental Surface ◽  
Wave Properties

Epitaxial growth of LiNbO3 thin films by excimer laser ablation method and their surface acoustic wave properties

1992 ◽  
Vol 285 ◽  
Author(s):  
Yoshihiko Shibata ◽  
Kiyoshi Kaya ◽  
Kageyasu Akashi ◽  
Masaki Kanai ◽  
Tomoji Kawal ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Frequency ◽  
Excimer Laser Ablation ◽  
Sapphire Substrates ◽  
Laser Ablation Method ◽  
Wave Properties ◽  
Laser Ablation Technique

ABSTRACTWe have formed epitaxial LiNbO3 thin films on sapphire substrates (001),(110) and (012) using an excmer-laser ablation technique. We have fabricated surface acoustic wave (SAW) filters on the films and evaluated SAW properties. It is demonstrated that the LINbO3 thin films on the sapphire substrates are candidates for a high frequency SAW filter because of their high velocities of propagation (5300–5600m/s).

Synthesis of AlN Thin Films on Sapphire Substrates by Chemical Vapor Deposition ofAlCl3–NH3System and Surface Acoustic Wave Properties

1996 ◽  
Vol 35 (Part 1, No. 5A) ◽  
pp. 2782-2787 ◽  
Author(s):  
Kiyoshi Kaya ◽  
Yasuhito Kanno ◽  
Hiroshi Takahashi ◽  
Yoshihiko Shibata ◽  
Toshio Hirai
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Sapphire Substrates ◽  
Wave Properties
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