Atomic Layer Deposition of High Quality HfO2Using In-Situ Formed Hydrophilic Oxide as an Interfacial Layer
2014 ◽
Vol 3
(12)
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pp. N155-N160
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2009 ◽
Vol 113
(19)
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pp. 8249-8257
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2018 ◽
Vol 89
(12)
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pp. 123702
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