scholarly journals Size Effects in Ruthenium-Based Thick-Film Resistors: Rutile vs. Pyrochlore-Based Resistors

1991 ◽  
Vol 14 (3) ◽  
pp. 163-173 ◽  
Author(s):  
M. Prudenziati ◽  
F. Sirotti ◽  
M. Sacchi ◽  
B. Morten ◽  
A. Tombesi ◽  
...  

The size effect, namely the change of sheet resistance, Rsas a function of resistor length, has been investigated in layers whose conductive phase evolves from Pb-rich (Ru-deficient pyrochlores) to Pb2Ru2O6.5and finally to RuO2by increasing the firing temperature. It is found that Bi diffusion from the terminations is responsible for lower sheet resistance values in shorter resistors whatever the conductive phase is. On the contrary, Ag diffusion is responsible for lower sheet resistance values in shorter resistors only in the case of ruthenate conductive grains while the reverse is observed in RuO2-based layers. Size effect can be suppressed with Pt/Au-based terminations provided that no Bi is contained and with Au-metallorganic-based contact provided that the peak firing temperature is not too high.

2015 ◽  
Vol 3 (10) ◽  
pp. 2319-2325 ◽  
Author(s):  
Sehee Ahn ◽  
Ayoung Choe ◽  
Jonghwa Park ◽  
Heesuk Kim ◽  
Jeong Gon Son ◽  
...  

Directed self-assembly of carbon nanotubes into 2D rhombic nanomesh films results in greatly lower sheet resistance, higher stretchability, and better mechanical durability than those of random carbon nanotube films.


2015 ◽  
Vol 778 ◽  
pp. 75-78
Author(s):  
Hai Yan Hao ◽  
Lei Dai ◽  
Zhe Li ◽  
Kam Hung Low

The effects of reducing the contact resistance of AgNW networks by using TiO2and PEDOT:PSS were compared. The AgNW+PEDOT:PSS TCE was able to give a lower sheet resistance of 30~60Ω/□, while the AgNW+TiO2gave a relatively higher, but still practical value of 85~125Ω/□. Then the AgNW+PEDOT:PSS TCE was further compared with the SWCNT+PEDOT:PSS TCE, and it was found the SWCNT+PEDOT:PSS TCE had a lower conductivity of 70~110Ω/□ but a superior long-term mechanical stability.


RSC Advances ◽  
2019 ◽  
Vol 9 (61) ◽  
pp. 35786-35796 ◽  
Author(s):  
Loganathan Veeramuthu ◽  
Bo-Yu Chen ◽  
Ching-Yi Tsai ◽  
Fang-Cheng Liang ◽  
Manikandan Venkatesan ◽  
...  

The as-designed heaters proved to be excellent candidates for employment in window defrosters, as they satisfy the essential prerequisites such as lower sheet resistance, high transparency, mechanical robustness and good stability to tensile strain.


1987 ◽  
Vol 92 ◽  
Author(s):  
Robert H. Reuss ◽  
Thomas P. Bushey

ABSTRACTRTA has been investigated for a variety of applications including implant anneal and modification of poly silicon. However, little has been reported on the integration of RTA into actual process flows. We describe here results for bipolar IC's with RTA for the fabrication of shallower junctions and lower sheet resistance (Rs) poly electrodes. For a successful bipolar IC, not only are good diode characteristics and related transistor parameters important, but also, resistor behavior, uniformity, and yield are critical. An AG Heatpulse system was used to successfully anneal the emitter implant of 2.0 um design rule bipolar IC's. The yield and variation in gate delay were comparable to furnace annealed counterparts. These results are especially encouraging since both transistor performance and resistor matching are critical for the circuits tested. However, significant improvement in gate delay was not observed.


2000 ◽  
Vol 610 ◽  
Author(s):  
Jinning Liu ◽  
Sandeep Mehta

AbstractThe drive towards developing deep sub-micron CMOS devices places more challenges on semiconductor processing. From the standpoint of doping technology, the challenge is to achieve ultra-shallow p+/n source/drain extension junctions for PMOS. Among the various approaches being pursued to meet this challenge, pre-amorphization was used to curtail channeling of the as-implanted Boron. The effect of pre-amorphization on junction depth and junction sheet resistance in the ultra-low implant energy regime is investigated in this study. Pre-amorphization was achieved with Ge implant. B was implanted at energies of 250eV to 5keV and at a dose of 1×1015cm−2 into crystalline and pre-amorphized wafers. Both spike anneal at 1050°C and furnace anneal at 500°C to 750°C were performed after B implants. In all spike anneal cases, the pre-amorphized wafers exhibit higher sheet resistance and shallower junction depth than crystalline wafers. In all furnace anneal cases, shallower junction depth as well as lower sheet resistance can be achieved with pre-amorphized wafers. Higher pre-amorphization energy induces lower sheet resistance after both furnace and rapid thermal anneal (RTA).


2022 ◽  
Author(s):  
Won-Hwa Park

Abstract Graphene can be used as a starting material for the synthesis of useful nano-complexes for flexible, transparent electrodes, therapeutic, bio-diagnostics and bio-sensing. In order to apply graphene in the medical field, chemical vapor deposition (CVD) method has been mainly utilized considering its large and near-homogenious carbon constituents. Especially, the less degree of perturbation of graphene monolayer (GM), which is followed by the underneath catalytic Cu surface morphology, is very crucial in terms of providing the suspended GM and relatively fluent lateral carrier mobility with lower sheet resistance value. In this work, we can suggest a surface-Enhanced Raman Spectroscopic (SERS) indicator in a quantitative way on the status of z-directional morphological corrugation of a CVD–grown GM (CVD-GM) by applying a Nanoparticle-on-Mirror (NPoM) system composed of Au nanoparticle (NP) / CVD-GM / Au thin film (TF) plasmonic junction structure. A new (or enhanced) Radial Breathing Like Mode (RBLM) SERS signal around ~150 cm-1 from CVD-GM spaced in NPoM is clearly observed by employing a local z-polarized incident field formed at the Au NP–Au TF plasmonic gap junctions. With this observation, the value of I[out-of-plane, RBLM] / I[in-plane, [2D] at certain domains, it can be suggested as a new optical nano-metrology value to relatively determine between lower z-directional morphological corrugation (or protrusion) status of a CVD-GM spaced in our NPoM system (lower I[RBLM] / I[2D] value) and higher degree of lateral carrier mobility of the CVD-GM associated with lower sheet resistance values as a result of higher blue-shifted Raman in-plane (G, 2D) peak maximum position. Furthermore, we will also expect the bio-sensing performances by utilizing the high specific surface area and ultrahigh flexibility of the CVD-GM in one of the future prospective works such as pressure-strain, strain-to-electricity and chemical-coupled sensor via I[RBLM] / I[2D] values.


2011 ◽  
Vol 8 ◽  
pp. 515-520 ◽  
Author(s):  
Y. Komatsu ◽  
M. Koorn ◽  
A.H.G. Vlooswijk ◽  
P.R. Venema ◽  
A.F. Stassen

2013 ◽  
Vol 2013 (1) ◽  
pp. 000078-000083
Author(s):  
Richard Schmidt ◽  
Marco Wenzel ◽  
Kathrin Reinhardt ◽  
Uwe Partsch ◽  
Lars Rebenklau ◽  
...  

New conductor pastes for AlN as substrate material with fired films of a sheet resistance below 25 mOhm/sq were investigated. The pastes consist of AgPd as conductive phase for leach resistance. Other paste ingredients are glasses of matched composition for adhesion and densification properties, little amounts of inorganic additives and organic vehicles for film deposition. The latter has a significant influence on the paste deposition and the resulting film properties as well. In order to shine light into these relationship systematic rheological studies of the organic vehicle and the manufactured pastes were performed. The rheological investigations include measurements in rheological steady-state as well as dynamic experiments. In addition, the solder properties of the fired film were studied. FESEM analyses were performed on the surface of the fired films.


RSC Advances ◽  
2016 ◽  
Vol 6 (79) ◽  
pp. 75541-75551 ◽  
Author(s):  
Feng Jiang ◽  
Jian Cai ◽  
Bing Liu ◽  
Yuebing Xu ◽  
Xiaohao Liu

Palladium particles of different sizes obtained directly and indirectly by various methods were studied to clarify the particle size effect in the selective hydrogenation of cinnamaldehyde (CAL).


Author(s):  
Gap-Yong Kim ◽  
Muammer Koc ◽  
Jun Ni

Application of microforming in various research areas has received much attention due to the increased demand for miniature metallic parts that require mass production. For the accurate analysis and design of microforming process, proper modeling of material behavior at the micro/meso-scale is necessary by considering the size effects. Two size effects are known to exist in metallic materials. One is the “grain size” effect, and the other is the “feature/specimen size” effect. This study investigated the “feature/specimen size” effect and introduced a scaling model which combined both feature/specimen and grain size effects. Predicted size effects were compared with experiments obtained from previous research and showed a very good agreement. The model was also applied to forming of micro-features by coining. A flow stress model for Type 304 stainless steel taking into consideration the effect of the grain and feature size was developed and implemented into a finite element simulation tool for an accurate numerical analysis. The scaling model offered a simple way to model the size effect down to length scales of a couple of grains and extended the use of continuum plasticity theories to micro/meso-length scales.


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