High-Speed Measurement of Large Area Micro-Structured Surfaces(Nano/micro measurement and intelligent instrument)

Author(s):  
Jun AOKI ◽  
Wei GAO ◽  
Satoshi KIYONO
2021 ◽  
Vol 92 (5) ◽  
pp. 054701
Author(s):  
T. Hennen ◽  
E. Wichmann ◽  
A. Elias ◽  
J. Lille ◽  
O. Mosendz ◽  
...  

2001 ◽  
Vol 13 (12) ◽  
pp. 1349-1351 ◽  
Author(s):  
M. Gokkavas ◽  
O. Dosunmu ◽  
M.S. Unlu ◽  
G. Ulu ◽  
R.P. Mirin ◽  
...  

Author(s):  
Yu Hirano ◽  
Masaru Kojima ◽  
Mitsuhiro Horade ◽  
Kazuto Kamiyama ◽  
Yasushi Mae ◽  
...  

1991 ◽  
Vol 224 ◽  
Author(s):  
C. Schietinger ◽  
B. Adams ◽  
C. Yarling

AbstractA novel wafer temperature and emissivity measurement technique for rapid thermal processing (RTP) is presented. The ‘Ripple Technique’ takes advantage of heating lamp AC ripple as the signature of the reflected component of the radiation from the wafer surface. This application of Optical Fiber Thermometry (OFT) allows high speed measurement of wafer surface temperatures and emissivities. This ‘Ripple Technique’ is discussed in theoretical and practical terms with wafer data presented. Results of both temperature and emissivity measurements are presented for RTP conditions with bare silicon wafers and filmed wafers.


2013 ◽  
Vol 844 ◽  
pp. 158-161 ◽  
Author(s):  
M.I. Maksud ◽  
Mohd Sallehuddin Yusof ◽  
M. Mahadi Abdul Jamil

Recently low cost production is vital to produce printed electronics by roll to roll manufacturing printing process like a flexographic. Flexographic has a high speed technique which commonly used for printing onto large area flexible substrates. However, the minimum feature sizes achieved with roll to roll printing processes, such as flexographic is in the range of fifty microns. The main contribution of this limitation is photopolymer flexographic plate unable to be produced finer micron range due to film that made by Laser Ablation Mask (LAMs) technology not sufficiently robust and consequently at micron ranges line will not be formed on the printing plate. Hence, polydimethylsiloxane (PDMS) is used instead of photopolymer. Printing trial had been conducted and multiple solid lines successfully printed for below fifty microns line width with no interference between two adjacent lines of the printed images.


1994 ◽  
Vol 05 (03) ◽  
pp. 253-274 ◽  
Author(s):  
MASAO OBARA ◽  
JUNKO AKAGI

AlGaAs/GaAs heterojunction bipolar transistor (HBT) high speed ICs have been paving the way for the most sophisticated fiber-optic communication systems since the late 1980s. Recently 20 Gbps HBT ICs have been developed to accommodate the emergence of optical fiber amplifiers. HBT technology is now proceeding towards the development of 40 Gbps systems where the lack of high speed measurement system remains an issue.


2014 ◽  
Vol 13 (1) ◽  
Author(s):  
Jan Čech ◽  
Jana Hanusová ◽  
Pavel Sťahel ◽  
Mirko Černák

AbstractDiffuse Coplanar Surface Barrier Discharge (DCSBD) is a novel type of atmospheric-pressure plasma source developed for high-speed large-area surface plasma treatments. The statistical behavior of microdischarges of DCSBD generated in artificial air atmosphere was studied using time-correlated optical and electrical measurements. Changes in behavior of microdischarges are shown for various electrode gap widths and input voltage amplitudes. They are discussed in the light of correlation of the number of microdischarges and the number of unique microdischarges’ paths per discharge event.The ‘memory effect’ was observed in the behavior of microdischarges and it manifests itself in a significant number of microdischarges reusing the path of microdischarges from previous half-period. Surprisingly this phenomenon was observed even for microdischarges of the same half-period of the discharge, where mechanisms other than charge deposition have to be involved. The phenomenon of discharge paths reuse is most pronounced for wide electrode


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